Three dimensional nanostructure fabrication technology using self-assemble phenomena

点击翻译按钮获取中文摘要

We developed three-dimensional nanostructure fabrication methods using a self-assembly phenomena of diblock copolymer, polystyrene-polymethyl methacrylate that forms pillar, pore and lamella structures at 30-100nm order scale. Concretely speaking, we proposed and demonstrated the following four methods :(1) Arrangement of the self-assembled nanostructures on three-dimensional nanostructures.(2) Alignment of the self-assembled nanostructures in three-dimensional space by using nano templates.(3) Fabrication of multilayer nanostructures using the self-assembled nanostructures as templates.(4) Fabrication of free standing self-assembled nanostructures using three-dimensional nano frames.(5) Nano patterning method of the self-assembled nanostructures by energy beam irradiation.(6) Thin film jointing method using focused ion beam irradiation.