Study of physical process during rapid heating of metal nanoparticle and the laser direct writing of micro-wiring
Study of physical process during rapid heating of metal nanoparticle and the laser direct writing of micro-wiring
批准号:
21360354
负责人:
WATANABE Akira
金额:
$4.99万
依托单位:
依托单位国家:
日本
项目类别:
Grant-in-Aid for Scientific Research (B)
财政年份:
2009
资助国家:
日本
项目状态:
已结题
起止时间:
2009 至 2011
关键词:
中文摘要
研究了激光局部快速加热金属纳米颗粒和激光直写微细布线的物理过程。通过对金属纳米颗粒照射激光,激光能量被金属纳米颗粒的等离子体激元带有效地吸收并立即转换成热能。通过对金属纳米颗粒进行激光辐照,研究了Cu纳米颗粒对Cu微图案化过程中氧化的抑制作用以及Cu纳米颗粒在Cu衬底上烧结Au纳米颗粒膜后Cu扩散到Au涂层膜中的抑制作用。
英文摘要
The physical process during the local rapid heating of metal nanoparticle by laser irradiation and the laser direct writing of micro-wiring were studied. By laser irradiation to a metal nanoparticle, the laser energy is effectively absorbed by plasmon band of the metal nanoparticle and immediately converted to thermal energy. The inhibition of oxidation during Cu micro-patterning using Cu nanoparticle and the reduction of Cu diffusion into Au coating film prepared by sintering of Au nanoparticle film on Cu substrate were developed by applying the laser irradiation to metal nanoparticles.
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DOI:
--
发表时间:
2010
期刊:
J. Photopolym. Sci. Technol
影响因子:
--
作者:
[Akira Watanabe, M. C. Yang, C. W. Cheng, C. Y. Lin, and W. C. Shen]
通讯作者:
and W. C. Shen
レーザー直接描画法を用いたウェットプロセスによる機能膜微細パターン形成 (Micropatterning of functional films by wet process using laser direct writing method)
使用激光直写法通过湿法工艺对功能薄膜进行微图案化
DOI:
--
发表时间:
2011
期刊:
第17回エレクトロニクスにおけるマイクロ接合・実装技術シンポジウム論文集
影响因子:
--
作者:
[伏見公志, 熊谷美那, 宮元一成, 長谷川靖哉, 渡辺明]
通讯作者:
渡辺明
かご型シルセスキオキサン系高分子材料
笼型倍半硅氧烷高分子材料
DOI:
--
发表时间:
2009
期刊:
ケイ素化学協会誌 26
影响因子:
--
作者:
[J. Jayaraj, C. L. Mendis, T. Ohkubo, K. Oh-ishi, K. Hono, 渡辺明]
通讯作者:
渡辺明
有機-無機ナノハイブリッド材料の新展開
有机-无机纳米杂化材料的新进展
DOI:
--
发表时间:
2009
期刊:
影响因子:
--
作者:
[大石敬一郎, ら, 渡辺明]
通讯作者:
渡辺明
Micropatterning of Functional Film by Liquid Phase Laser Direct Patterning Method
液相激光直接图案化法对功能膜进行微图案化
DOI:
--
发表时间:
2011
期刊:
J. Photopolym. Sci
影响因子:
--
作者:
[A. Watanabe, E. Ohta and A. Shimofuku]
通讯作者:
E. Ohta and A. Shimofuku
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