Research on nano-precision simple-form gauge and calibration method of curve measuring machine

具有几何曲面的机械零件表面的微形态影响着机械装置的性能和质量。因此，这些零件的质量是用曲线测量机来检测的。然而，用于评定和校准曲线测量机的量规的精度不高，因此很难保证这些测量机的高精度。为解决这一问题，提出了用平面和圆柱体组成的量规进行曲线测量的评定/标定方法。对所提出的方法进行了理论分析。通过实验验证了该方法的有效性。

Micro form on the surface of machine parts which have geometrically curved surfaces influences the function and quality of the mechanical devices. Therefore the quality of those parts is inspected using the curve measuring machine. However, the accuracy of the gauge used for evaluation and calibration of curve measuring machines is not high and thus it is difficult to warrant the high accuracy of those measuring machines. In order to solve this problem, the evaluation/calibration method using the gauge for curve measurement which is composed of plane and cylinder is developed. The proposed method is theoretically analyzed. Experiment is carried out and the effectiveness of the method is confirmed.