Development of an assembly-free fabrication process for microsystems driven by distributed actuators on a chip

磁性纳米粒子/SU-8复合材料有望成为一种可通过外加磁场控制、仅用光刻法即可制备的微致动器材料。在这项研究中，我们评估了建议的纳米复合材料的分散性混合的行星和超声波搅拌器。结果表明，行星式搅拌器比超声波搅拌器具有更高的分散性。此外，我们提出了免组装集成方法的驱动元件内部制造的液体纳米复合材料和牺牲抗蚀剂注入到微通道曝光前。通过在微通道中的磁驱动测试，证实了由所提出的纳米复合材料制成的制造元件随着由电磁铁施加的外部磁场而移动。

Composite material made of magnetic nanoparticles/SU-8 is expected to be a material of microactuators which can be controlled by external magnetizing field and easily fabricated by only photolithography. In this study, we evaluated the dispersivity of the proposed nanocomposites mixed by a planetary and an ultrasonic stirrers. As a result, the planetary stirrer achieves higher dispersivity than the ultrasonic one. Moreover, we propose assembly-free integration method for driving elements internally fabricated by infusing liquid nanocomposite and sacrificial resist into a microchannel before exposing. By a magnetic driving test in the microchannel, it is confirmed that the fabricated element made of the proposed nanocomposite moved with the external magnetic field applied by an electromagnet.