Development of Electrical Characteristics Measurement for Piezoelectric Transformer-Based Plasma Reactors

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The present study is intended to develop further the measurement method of the electrical characteristics for the piezoelectric transformer (PT)-based plasma reactors. The reactor that allows us to measure the spatially-resolved surface potential on the PT and discharge power for the dielectric barrier discharge (DBD) is constructed. A high-input resistance potential divider suitable for the measurement is also developed, which is possible to avoid the disturbance during the surface potential measurements. Also, it is found that the edge effect near the tip of the PT cannot be negligible for the measurement, which behaves another disturbance for the surface potential profile. The correction method is therefore investigated and the surface potential and discharge power distributions can be determined accurately.