Constructing of film-deposition system equipped precursor recycling system

本研究的目的是开发一种新型的薄膜沉积系统，该系统完全基于超临界流体技术设计，配备金属有机前驱体回收系统。本课题通过超临界co2萃取分离金属有机化合物回收系统的试制，模拟成膜设备模拟条件下金属有机化合物的收集，以及对超临界co2成膜过程中未反应前驱体和副产物化合物的同时收集进行结结性讨论。获得了二氧化钛（TiO_2）薄膜典型前驱体Ti β-二酮酸酯在超临界CO_2条件下溶解分解行为的一些有价值的数据和知识，从而阐明了金属有机前驱体到固体TiO_2沉积的反应机理。

The purpose of this research is to develop novel thin-film deposition system equipped recycling system for metal-organic precursors, which is designed totally based on supercritical fluid technology. The present research project was accomplished through (i) the trial production of recycling system for metal-organic compounds by extraction and separation process using supercritical carbon dioxide (CO_2), (ii) simulated experiment for collecting metal-organic compounds under pseudo-condition in film-deposition equipment, and (iii) conclusive discussion for simultaneous collection of unreacted precursors and byproduct compounds during film-deposition process under supercritical CO_2. We obtained some valuable data and knowledge for dissolution and decomposition behavior of Ti β-diketonates, typical precursors for titanium dioxide (TiO_2) films, under supercritical CO_2 condition, and then clarified the reaction mechanism from metal-organic precursors to solid TiO_2 deposition.