High-Speed Non-Contact Removal Processing Technology of Brittle Materials Using a Exfoliation Phenomenon by the Laser Heating

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When the CO_2 laser is scanning a soda-lime glass under the specific condition, the phenomenon that a smooth groove and the continuous glass chip occur on the glass surface has been discovered. Now, it is expected that this phenomenon can be applied to the new non-contact removal processing method of the brittle material. The purpose of the present research is to elucidate the mechanism of this phenomenon.In this research, laser irradiation experiments were carried out to the side glass under several conditions. Moreover, FEM analysis was performed under the condition this phenomenon occurs. From the results, the mechanism of this phenomenon was found.