A novel fabrication technique based on coherent phonon oscillation by using femto pulse train beam

当激光脉冲与金属或半导体靶相互作用时，在靶表面激发出具有相位相干性和非线性电子加热的晶格振荡。提出了一种新的相干声子振荡飞秒脉冲纳米烧蚀过程。利用空间光调制器对飞秒激光脉冲进行相位控制，实现了飞秒激光脉冲串的整形。通过控制脉冲串的形状，相干声子振荡得到增强和衰减。它能够有效地加速或减速晶格运动。我们提出了飞秒脉冲整形及其时间分辨探测系统来挑战这种方法。

When a laser pulse interacts with metal or semiconducting target, the lattice oscillation, which has phase coherence and nonlinear electron heating, is excited on their surfaces. We propose a novel femto pulse nano ablation process with oscillation of the coherent phonon. The pulse train, which is excited by femtosecond pulse, is shaped by using spatial light modulator to control the phase of the passing light. And coherent phonon oscillations are enhanced and decayed due to the controlling the shape of pulse train. It enables to accelerate or decelerate the lattice motion efficiently. We suggest femto pulse shaping and its time resolving detection system to challenge that method.