A novel fabrication technique based on coherent phonon oscillation by using femto pulse train beam

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When a laser pulse interacts with metal or semiconducting target, the lattice oscillation, which has phase coherence and nonlinear electron heating, is excited on their surfaces. We propose a novel femto pulse nano ablation process with oscillation of the coherent phonon. The pulse train, which is excited by femtosecond pulse, is shaped by using spatial light modulator to control the phase of the passing light. And coherent phonon oscillations are enhanced and decayed due to the controlling the shape of pulse train. It enables to accelerate or decelerate the lattice motion efficiently. We suggest femto pulse shaping and its time resolving detection system to challenge that method.