New material design toward development of micro sensors for detection of environment-related gases

本研究探讨了氧化物半导体在建立环境保护用微型气敏元件方面的基本认识。特别是研究了通过控制晶粒尺寸和施主密度而形成的半导体耗尽态、施主密度与氧吸附量的关系、对氧化物表面的掩蔽效应、受体功能及其最佳负载方法等。作为研究结果之一，在理论和实验的基础上，制备了ppb级的甲苯VOC传感器。

In this study, basic understandings of oxide semiconductor toward establishment of micro gas sensors for environmental protection have been investigated. Especially depletion state of semiconductors due to controlling grain size and donor density, relationship between donor density and amount of oxygen adsorption, masking effect on oxide surface, receptor function and its optimal loading method, etc. were researched. As one of the results, the VOC sensor in ppb level to toluene was prepared based on the obtained theories and experiments.