High power surface acoustic wave motor

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A surface acoustic wave motor that utilizes 80 mm long, 13 mm wide and 1 mm thick 128-degree-roted Y, X-propagation lithium niobate has been fabricated. A slider was 4 mm long and 9 mm wide that was slightly narrower than that of wave propagation width. For low-profile structure and stable operation, parallel leaf springs were used for preload. No-load speed of 1.3 m/s and the maximum thrust of 11 N were recorded. These values are top records as a compact linear motor. The device weight was only 5.4 g, and even total weight was 205 g, which are very light for 11 N thrust.