Fundamental study on micro ultrasonic motor

微型超声波电机基础研究

• 批准号: 07455041
• 负责人: KUROSAWA Minoru
• 金额: $ 4.8万
• 依托单位: UNIVERSITY OF TOKYO
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Scientific Research (B)
• 财政年份: 1995
• 资助国家: 日本
• 起止时间: 1995 至 1996
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-07455041/
• 关键词: ultrasonic motor; micro actuator; surface acoustic wave; PZT thin film; lithium niobate; linear motor; fiction drive; piezoelectric transducer

For reduction of the size of ultrasonic motor down to mm order in its major size, piezoelectric material and the friction drive condition are the most important factor. We tried to improve the hydro thermal method to deposit the PZT thin film on titanium base material. Then, the fiction drive condition of nm order ultrasonic vibration has been investigated and obtained interesting results.The improved way of depositing the PZT film on titanium is a single process. The process temperature, density of material in the solution and the KOH density were examined to optimize the reaction. Hence the process is single, the control of the reaction was rather easy. The PZT film was successfully deposited on titanium directory. The improve piezoelectric film has superior performance to make micro ultrasonic motor. At 5V driving voltage, the output torque was 7 muNm. It was 40 times lager than previous one.The friction drive condition was investigated using 10 MHz surface acoustic wave linear motor. At the optimum condition to obtain larger output force, the force density was more than 100 N/nm^2. The actual output force was about 0.45 N by 6mm x 6mm slider.By using higher driving frequency, high contact pressure and improved PZT thin film, micro ultrasonic motor down to sub mm size will be available.

为了将超声电机的主要尺寸减小到毫米量级，压电材料和摩擦驱动条件是最重要的因素。我们尝试改进水热法在钛基材料上存款PZT薄膜。在此基础上，对纳米级超声振动的摩擦驱动条件进行了研究，得到了一些有趣的结果。考察了工艺温度、溶液中物料密度和KOH浓度对反应的影响。因此，该过程是单一的，反应的控制相当容易。成功地在钛基片上沉积了PZT薄膜。改进后压电薄膜具有上级性能，可用于制作微型超声电机。在5V驱动电压下，输出扭矩为7 μ Nm。利用10 MHz声表面波直线电机对摩擦驱动条件进行了研究。在获得更大输出力的最佳条件下，力密度大于100 N/nm^2。采用6 mm × 6 mm的滑块，实际输出力约为0.45N，通过提高驱动频率、提高接触压力和改进PZT薄膜，可实现亚毫米级的微型超声电机。

项目成果

Chiba,M., Takahashi,M., Kurosawa,M., and Higuchi,T.: "Evaluation of a surface acoustic wave motor output force" Proc.of IEEE Workshop on Micro Electro Mechanical Systems. 250-255 (1997)

Chiba,M.、Takahashi,M.、Kurosawa,M. 和 Higuchi,T.：“表面声波电机输出力的评估”Proc.of IEEE 微机电系统研讨会。

Morita,T.,Kurosawa,M.and Higuchi,T.: "Design of a cylindrical ultrasonic moicromotor to obtain mechanical output," Jpn.J.Appl.Phys.part 1,. 3515B. 3251-3254 (1996)

Morita,T.、Kurosawa,M. 和 Higuchi,T.：“获得机械输出的圆柱形超声波微电机的设计”，Jpn.J.Appl.Phys.part 1，。

Morita, T., Kurosawa, M.and Higuchi, T.: "Design of a cylindrical ultrasonic moicromotor to obtain mechanical output" Jpn.J.Appl.Phys.part 1,35/5B. 3251-3254 (1996)

Morita, T.、Kurosawa, M. 和 Higuchi, T.：“获得机械输出的圆柱形超声波微电机的设计”Jpn.J.Appl.Phys.part 1,35/5B。

Kurosawa.M.,Takahashi.M.and Higuchi,T.: "Ultrasonic linear motor using suface acoustic wave" IEEE Trans.UFFC,. 43(5). 901-906 (1996)

Kurosawa.M.、Takahashi.M. 和 Higuchi,T.：“使用表面声波的超声波直线电机”IEEE Trans.UFFC，。

Kurosawa, M., Takahashi, M.and Higuchi, T.: "Friction drive surface acoustic wave motor" Ultrasonics. 34. 243-246 (1996)

Kurosawa, M.、Takahashi, M. 和 Higuchi, T.：“摩擦驱动表面声波电机”超声波。