High Power Hydrothermal PZT Film and its Application to Transducers

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High intensity vibration characteristics of the hydrothermaly deposited PZT thin film ultrasonic vibrator was examined. It was found that the hydrothermal deposition PZT film transducer had the superior characteristics at high intensity vibration condition. In case of bulk piezoelectric material, the transducer has non linear response against the variation of the frequency. However, the hydrothermal PZT film transduecer had linear response enven in high intensity vibration operation. We fabricated a transducer whose dimenstions were 1 mm wide, 7.8 mm long and 1.2 mm thick, then vibration characteristics was measured. The transducer which was 15 times deposition process and 38 μm PZT thick produced 2.24 m/sec vibration velocity at the driving voltage of 145 Vp-p. This value was more than 2 times of a bulk PZT material for high power application. Moreover, it was close to a crystal piezo material such as litium niobate transducer of 3 m/sec. It seems that the hydrothermal PZT h!as poly crysital structure, hence it has superior characteristics at high intensity vibariton operation.we examined the preprocess of the titanium treatment, then the piezoelectric constant was improved up to 2 times of the previouse one. A novel process of elector chemical method was tried. Large amount of deposition was obtained in short time reaction. Farther investigation is required for this point. Sonochemical method was also tried, but it requires deep investigation.