权益分类	功能权益	普通用户	{{item.name}}会员
{{category.name}}	{{benefitItem.name}}

High Power Hydrothermal PZT Film and its Application to Transducers

高功率水热PZT薄膜及其在换能器中的应用

基本信息

批准号：
11450135
负责人：
KUROSAWA Minoru
金额：
$ 8.64万
依托单位：
Tokyo Institute of Technology
依托单位国家：
日本
项目类别：
Grant-in-Aid for Scientific Research (B).
财政年份：
1999
资助国家：
日本
起止时间：
1999 至 2000
项目状态：
已结题

来源：
https://kaken.nii.ac.jp/en/grant/KAKENHI-PROJECT-11450135/
关键词：
piezoelectric material PZT PZT thin film transducer vibrator actuator sensor vibration verocity

项目摘要

High intensity vibration characteristics of the hydrothermaly deposited PZT thin film ultrasonic vibrator was examined. It was found that the hydrothermal deposition PZT film transducer had the superior characteristics at high intensity vibration condition. In case of bulk piezoelectric material, the transducer has non linear response against the variation of the frequency. However, the hydrothermal PZT film transduecer had linear response enven in high intensity vibration operation. We fabricated a transducer whose dimenstions were 1 mm wide, 7.8 mm long and 1.2 mm thick, then vibration characteristics was measured. The transducer which was 15 times deposition process and 38 μm PZT thick produced 2.24 m/sec vibration velocity at the driving voltage of 145 Vp-p. This value was more than 2 times of a bulk PZT material for high power application. Moreover, it was close to a crystal piezo material such as litium niobate transducer of 3 m/sec. It seems that the hydrothermal PZT h!as poly crysital structure, hence it has superior characteristics at high intensity vibariton operation.we examined the preprocess of the titanium treatment, then the piezoelectric constant was improved up to 2 times of the previouse one. A novel process of elector chemical method was tried. Large amount of deposition was obtained in short time reaction. Farther investigation is required for this point. Sonochemical method was also tried, but it requires deep investigation.

研究了水热沉积PZT薄膜超声振子的高强度振动特性。结果表明，水热沉积PZT薄膜换能器在高强度振动条件下具有优越的特性。对于块状压电材料，换能器对频率的变化具有非线性响应。然而，水热PZT薄膜换能器在高强度振动工作时具有线性响应。制作了宽1 mm、长7.8 mm、厚1.2 mm的换能器，测量了换能器的振动特性。该换能器为沉积工艺的15倍，压电层厚度为38μm，在145Vp-p的驱动电压下，振速为2.24m/s。这一值是用于大功率应用的块状PZT材料的2倍多。此外，它还接近于晶体材料，如3m/s的Litium Nobate换能器。水热PZT h！是一种多晶结构，在高强度可控震荡下具有优越的特性。我们考察了钛处理的前处理工艺，使其压电常数提高了2倍以上。尝试了一种新的电子化学方法。在较短的反应时间内获得了大量的沉积。这一点还需要进一步调查。也尝试了声化学方法，但还需要深入研究。