Development of the deposition tool using high pressure synthesis technique and tailoring of the novel property for the Apatite thin film

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This work succeeded in developing the deposition-technique applying supercritical fluid of the carbon dioxide(supercritical CO_2), and in the deposition of TiO_2 thin film on the quartz substrate by using it. Now, further modifications are made for this deposition technique in order to improve the film-quality. This modification is expectable our technique to become quite unique and rare one in the world. Additionally, the study for the synthesis condition under the supercritical CO_2 atmosphere gave us low temperature and short time condition for obtaining the powder sample of the hydroxyapatite(HAp) and/or the related materials easily. The investigation for summarizing these results is now in progress.