Development of the deposition tool using high pressure synthesis technique and tailoring of the novel property for the Apatite thin film

本工作成功地发展了二氧化碳(超临界CO_2)超临界流体沉积技术，并利用该技术在石英衬底上沉积了二氧化钛薄膜。现在，对这种沉积技术进行了进一步的修改，以提高薄膜的质量。这一改进是可以预期的，我们的技术将成为世界上非常独特和罕见的技术。此外，对超临界CO_2气氛下的合成条件进行了研究，为制备羟基磷灰石(HAP)和/或相关材料的粉末样品提供了低温短时间的条件。总结这些结果的调查目前正在进行中。

This work succeeded in developing the deposition-technique applying supercritical fluid of the carbon dioxide(supercritical CO_2), and in the deposition of TiO_2 thin film on the quartz substrate by using it. Now, further modifications are made for this deposition technique in order to improve the film-quality. This modification is expectable our technique to become quite unique and rare one in the world. Additionally, the study for the synthesis condition under the supercritical CO_2 atmosphere gave us low temperature and short time condition for obtaining the powder sample of the hydroxyapatite(HAp) and/or the related materials easily. The investigation for summarizing these results is now in progress.