Development of the deposition tool using high pressure synthesis technique and tailoring of the novel property for the Apatite thin film

利用高压合成技术开发沉积工具并定制磷灰石薄膜的新性能

• 批准号: 22760014
• 负责人: NAKANE Takayuki
• 金额: $ 2.66万
• 依托单位: National Institute for Materials Science
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Young Scientists (B)
• 财政年份: 2010
• 资助国家: 日本
• 起止时间: 2010 至 2011
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-22760014/
• 关键词: 超臨界; 成膜; アパタイト; 新機能材料

This work succeeded in developing the deposition-technique applying supercritical fluid of the carbon dioxide(supercritical CO_2), and in the deposition of TiO_2 thin film on the quartz substrate by using it. Now, further modifications are made for this deposition technique in order to improve the film-quality. This modification is expectable our technique to become quite unique and rare one in the world. Additionally, the study for the synthesis condition under the supercritical CO_2 atmosphere gave us low temperature and short time condition for obtaining the powder sample of the hydroxyapatite(HAp) and/or the related materials easily. The investigation for summarizing these results is now in progress.

本工作成功地发展了超临界CO_2流体沉积技术，并利用该技术在石英衬底上沉积了TiO_2薄膜，目前正在对该沉积技术作进一步的改进，以提高薄膜质量。这种修改预计我们的技术将成为世界上非常独特和罕见的技术。此外，对超临界CO_2气氛下合成条件的研究，为我们提供了低温、短时间的条件，可以方便地获得羟基磷灰石（HAp）及相关材料的粉末样品。目前正在进行调查，以总结这些结果。