Research on quantum behavior of a nanomechanical resonator

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This research focused on a graphene as a material of nano mechanical resonators. In order to improve the quality factor of the graphene resonator, the research proposed a new fabrication method of a graphene resonator. The method uses SU-8 as a material of supporting structure and can apply a tensile stress to the resonator by annealing to induce shrinkage of the supporting structure. The fabricated graphene resonator based on the proposed method showed more than 7000 of the quality factor at a room temperature, the value of which is the largest in the world as reported. The drastic improvement of the quality factor was discussed from supporting conditions, thermal elastic damping effects and quantum viewpoints as well.