Geometry generation of minute three-dimensional structure in wide scale range by means of water jet and focused ion beam

利用水射流和聚焦离子束在大尺度范围内生成微小三维结构的几何形状

基本信息

批准号：
13305012
负责人：
WARISAWA Shin'ichi
金额：
$ 5.24万
依托单位：
The University of Tokyo
依托单位国家：
日本
项目类别：
Grant-in-Aid for Scientific Research (A)
财政年份：
2001
资助国家：
日本
起止时间：
2001 至 2002
项目状态：
已结题

项目摘要

This research proposes a rational method of manufacturing minute parts by complex machining methods in consideration of manufacturability in micro scale and functions of parts to be machined. An important issue is to examine the combination of machining methods appropriate to realize required functions of parts to be machined. Machining methods to be used should have mutually different feasible machining size, machining accuracy, or shape accuracy Although there would be multifarious combinations of machining methods, water jet machining technology makes up the core in this research. It is because that water jet machining technology can realize multifarious machining types from cutting to polishing by changing water jet pressure and abrasive particle size. Furthermore, it is made clear in this research that water jet machining technology can realize wide range of machining size and accuracy. The latter issue is due to proposal of a new water jet machining method in which fine abrasive particles less than 1μm can be used that is impossible in conventional way. In the original plan, a combination of water jet machining and focused ion beam machining was focused. However, combinations of other machining methods are also examined after discussions of machining limitations of water jet and focused ion beam. In concrete, cutting by a single crystal diamond, ultra violet laser machining, semiconductor manufacturing process are in consideration to make minute parts. Finally, using methods examined mentioned above, following parts are manufactured (1) edge chamfering of cylindrical roller for bearing (edge radius 1mm), (2) ultra finishing of an artificial femoral head (surface roughness 7nm Ra), (3) micro groove on a glass material (10um depth), and (4) micro electrode for atom trapping.

这项研究提出了一种通过复杂的加工方法来制造分钟零件的合理方法，以考虑微观制造和要加工的零件的功能。一个重要的问题是检查合适的加工方法的组合，以实现要加工的零件的所需功能。要使用的加工方法应具有相互不同的可行加工尺寸，加工精度或形状精度，尽管加工方法的组合将有多种组合，但是水喷射加工技术构成了这项研究的核心。这是因为水上机加工技术可以通过换水压力和磨料粒径来实现从切割到抛光的多种加工类型。此外，在这项研究中清楚地表明，水喷射加工技术可以实现广泛的加工尺寸和准确性。后一个问题是由于提出了一种新的水喷射加工方法，其中可以使用小于1μm的细磨料颗粒以常规方式是不可能的。在原始计划中，将水流加工和聚焦离子束加工的组合组合在一起。但是，在讨论了水流和聚焦离子束的加工局限性之后，还检查了其他加工方法的组合。在混凝土中，通过单晶钻石，超紫色激光加工，半导体制造工艺进行切割以制作微小的零件。最后，使用上面提到的方法，以下零件是制造的（1）圆柱辊的边缘倒角（边缘半径为1mm），（2）人造股骨头的超整整（表面粗糙度为7nm ra），（3）玻璃材料上的微凹槽（3）微凹槽（10UM深度），以及（4）Micro Electrode，用于Micro Electerode，用于ATOM Trapping。