Hybrid actuator-driven ultraprecision 2-DOF rotary table system

混合执行器驱动的超精密二自由度转台系统

• 批准号: 22686016
• 负责人: YOSHIOKA Hayato
• 金额: $ 16.31万
• 依托单位: Tokyo Institute of Technology
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Young Scientists (A)
• 财政年份: 2010
• 资助国家: 日本
• 起止时间: 2010 至 2011
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-22686016/
• 关键词: ハイブリッド駆動; 空気圧アクチュエータ; 電磁アクチュエータ; 回転テーブル; 超精密位置決め; 空気静圧軸受; 静圧軸受

In order to realize an ultraprecision 2-DOF rotary table system, key technologies for the table system has been proposed and evaluated in this study. A hybrid driving mechanism which can achieve high torque, quick response, and low heat generation, a torque ripple-free electric motor for precise rotation, and a high stiff and high damping hydrostatic bearing system were newly developed, and their basic characteristics were clarified.

为了实现超精密二自由度转台系统，提出了转台系统的关键技术，并进行了评价。介绍了一种高转矩、快速响应、低发热的混合驱动机构、一种无转矩脉动的精密旋转电机和一种高刚度、高阻尼的静压轴承系统，并阐明了它们的基本特性。

项目成果

A newly developed toroidal type torque ripple-free precision motor

新开发的环形型无扭矩脉动精密电机

• 发表时间: 2011
• 作者: Hayato Yoshioka;Yugo Kurisaki;Hiroshi Sawano;Hidenori Shinno
• 通讯作者: Hidenori Shinno

A hybrid actuator-driven compact tilting motion table system for multi-axis ultraprecision machine tool, 11th International Conference of the euspen

用于多轴超精密机床的混合执行器驱动的紧凑型倾斜运动台系统，第11届euspen国际会议

• 发表时间: 2011
• 作者: Mamoru Hayashi;Hayato Yoshioka;Hidenori Shinno;Hiroshi Sawano
• 通讯作者: Hiroshi Sawano

A Hybrid Actuator-driven Compact Tilting Motion Table System for Multi-axis Ultraprecision Machine Tool

混合执行器驱动的紧凑型多轴超精密机床倾斜运动工作台系统

• 发表时间: 2011
• 作者: H.Tsuchihira;T.Oda;S.Tanaka;林遵
• 通讯作者: 林遵

A Newly Developed Ripple Free Precision Toroidal Type Motor

新开发的无纹波精密环形电机

• DOI: 10.1016/j.cirp.2012.03.140
• 发表时间: 2012
• 期刊: CIRP Annals – Manufacturing Technology
• 作者: H.Yoshioka;Y.Kurisaki; H.Sawano;H.Shinno
• 通讯作者: H.Shinno