Crystal structure change in CrN by atom substitution; Factor elucidation and preparation of new super hard material

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Hardening of coated thin films on cutting tools can increase an efficiency of cutting process. We have developed new material. The new material Cr(N,0), where O atoms are substituted for N atoms in CrN lattice, showed high hardness and superior oxidation resistance. It was found that the crystal structure kept NaC1 type in spite of O atom substitution, since vacancies in Cr site were introduced with increasing oxygen content. Also, Cr(N,0) thin films with large crystalline size were successfully prepared on MgO single crystal substrate. These thin films revealed the oxygen substitution clear, and cause of high oxidation resistance.