Catheter Type of Flow Sensor for Measurement of Aspirated- and Inspired-air Characteristics in Bronchus Region

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MEMS technologies was used to produce a catheter flow sensor that could be used to trans-bronchially measure aspirated- and inspired-air flow characteristics in order to precisely evaluate COPD. The catheter flow sensor was fabricated on a biocompatible parylene HT film. The film was mounted inside the surface of a thermal shrinkable tube 1.94 mm in (outer) diameter. Both functions of the flow and temperature sensing of the fluid was integrated on the catheter flow sensor system. The groove structure was also produced between the flow- and the temperature-sensors for the thermal isolation. The produced catheter flow sensor was inserted into the air passage of a mouse by using an adapter, and the air flow passing through the tube was directly measured. By adding the temperature compensation function, the volumes of the expired- and inspired-air closely matched. The experiments were conducted under the regulations set forth for Nagoya University Animal Experimentation.