Development of multifunctional active tactile sensor using magnetic micro-actuator

利用磁性微执行器开发多功能主动触觉传感器

• 批准号: 15310104
• 负责人: SHIKIDA Mitsuhiro
• 金额: $ 8.64万
• 依托单位: Nagoya University
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Scientific Research (B)
• 财政年份: 2003
• 资助国家: 日本
• 起止时间: 2003 至 2004
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/en/grant/KAKENHI-PROJECT-15310104/
• 关键词: Micro-sensor; Tactile sensor; Micro-actuator; マイクロコイル

We proposed a multifunctional active tactile sensor device driven by magnetic force. The device has an advantage that single device can detect multiple physical values, such as contact-force and elastic-and damping-coefficient of a contacted object. We studied the followings in this project.(1)Device designWe determined the specification for the sensor element and the flat coil driving element for detecting the hardness of human fingers.(2)Fabrication processWe developed fabrication process of both elements by applying micro-electro-mechanical systems(MEMS) technology. The size of fabricated sensor and diaphragm with Si-mesa was 6.0 mm x 6.0 mm x 425 μm and 4.0 mm x 4.0 mm x 10 μm, respectively, and attached a commercially available 1.3 T Nd-Fe-B permanent magnet (1 mm x 1 mm x 1 mm)to the backside. The size of flat coil with 14 turns was 4.2 mm x 4.2 mm x 35 μm. We realized hybrid active tactile sensor system by assembling them for detecting multiple physical values.(3)Hardness detectionWe also proposed a theoretical sensor model of the hardness detection, and experimentally confirmed both of elastic-and damping-coefficient detection by using different types of silicone rubbers

提出了一种磁力驱动的多功能主动触觉传感器装置。该装置的优点在于，单个装置可以检测多个物理值，例如接触物体的接触力和弹性和阻尼系数。我们在这个项目中研究了以下内容。（1）装置设计我们确定了用于检测人体手指硬度的传感器元件和扁平线圈驱动元件的规格。（2）制作工艺采用微电子机械系统（MEMS）技术开发了两种元件的制作工艺。所制造的具有Si台面的传感器和隔膜的尺寸分别为6.0 mm x 6.0 mm x 425 μm和4.0 mm x 4.0 mm x 10 μm，并且将市售的1.3 T Nd-Fe-B永磁体（1 mm x 1 mm x 1 mm）附接到背面。具有14匝的扁平线圈的尺寸为4.2 mm x 4.2 mm x 35 μm。将它们组合起来，实现了混合式主动触觉传感器系统，用于检测多个物理量。（3）硬度检测提出了一种硬度检测的理论传感器模型，并对不同类型的硅橡胶进行了弹性系数和阻尼系数检测的实验验证

项目成果

Magnetic actuation of a micro-diaphragm structure for an active tactile sensor

用于主动触觉传感器的微隔膜结构的磁驱动

• 发表时间: 2004
• 期刊: Proceedings of the 2004 International Symposium on Micro Machine and Human Science
• 作者: Y.Hasegawa;H.Sasaki;M.Shikida;K.Sato;K.Itoigawa
• 通讯作者: K.Itoigawa

Multifunctional active tactile sensor using magnetic micro actuator

使用磁性微致动器的多功能主动触觉传感器

• 发表时间: 2005
• 期刊: Tech.Dig.of IEEE Micro Electro Mechanical Systems Conference
• 作者: Y.Hasegawa;H.Sasaki;M.Shikida;K.Sato;K.Itoigawa
• 通讯作者: K.Itoigawa

Y.Hasegawa, T.Shimizu, T.Miyaji, M.Shikida, H.Sasaki, 他2名: "A micro machined active tactile sensor for hardness detection"Sensors and Actuators. (accepted).

Y.Hasekawa、T.Shimizu、T.Miyaji、M.Shikida、H.Sasaki 和另外 2 人：“用于硬度检测的微机械主动触觉传感器”传感器和执行器（已接受）。

Magnetically driven active tactile sensor for hardness detection

用于硬度检测的磁驱动主动触觉传感器

• 发表时间: 2004
• 期刊: Tech.Dig.the 21st Sensor Symposium
• 作者: Y.Hasegawa;H.Sasaki;M.Shikida;S.Kuriyama;他2名
• 通讯作者: 他2名

Y.Hasegawa, T.Shimizu, T.Miyaji, M.Shikida, H.Sasaki, 他2名: "Hardness detection using a micromachined active tactile sensor"Tech.Dig.of Transducers'03. 1. 927-930 (2003)

Y.Hasekawa、T.Shimizu、T.Miyaji、M.Shikida、H.Sasaki 和另外 2 人：“使用微机械主动触觉传感器进行硬度检测”Tech.Dig.of Transducers03 (2003) ）