Development of multifunctional active tactile sensor using magnetic micro-actuator

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We proposed a multifunctional active tactile sensor device driven by magnetic force. The device has an advantage that single device can detect multiple physical values, such as contact-force and elastic-and damping-coefficient of a contacted object. We studied the followings in this project.(1)Device designWe determined the specification for the sensor element and the flat coil driving element for detecting the hardness of human fingers.(2)Fabrication processWe developed fabrication process of both elements by applying micro-electro-mechanical systems(MEMS) technology. The size of fabricated sensor and diaphragm with Si-mesa was 6.0 mm x 6.0 mm x 425 μm and 4.0 mm x 4.0 mm x 10 μm, respectively, and attached a commercially available 1.3 T Nd-Fe-B permanent magnet (1 mm x 1 mm x 1 mm)to the backside. The size of flat coil with 14 turns was 4.2 mm x 4.2 mm x 35 μm. We realized hybrid active tactile sensor system by assembling them for detecting multiple physical values.(3)Hardness detectionWe also proposed a theoretical sensor model of the hardness detection, and experimentally confirmed both of elastic-and damping-coefficient detection by using different types of silicone rubbers