Accumulation of atoms due to a concentration of electron flow near the corner composed of dissimilar metal lines and its utilization for fabrication of various micro/nano structures

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This study treated the fabrication of micro/nano structures utilizing electromigration where the atoms are moved by the electron flow. To accumulate atoms efficiently, we paid attention to the corner composed of dissimilar metal lines. First theoretical analysis on the accumulation of atoms at the corner was performed, and based on the analytical results, new samples for effectively fabricating various micro/nano structures were fabricated. Various micro/nano structures, e.g., longer wire, wire array, tube, etc. were realized by the new samples. Mechanical, electromagnetic and thermal properties of the micro/nano structures were also investigated. Finally the guidelines for effectively fabricating the micro/nano structures utilizing electromigration was pointed out.