Efficient method for ordered nano dot array fabrication by combination of machining and self-organization process

该项目旨在以低成本开发有效的工艺来生产具有10 nm水平的金纳米点阵列。本课题得到的主要结论有三点：纳米塑料成型构图和退火自组织相结合的方法可以制备出直径小于100 nm的纳米点阵列;采用纳米压印技术对纳米点阵列进行沟槽网格构图是提高纳米点阵列生产率的有效方法。结果表明，纳米点阵列具有独特的光学性质，并显示出作为生物传感器的工业应用潜力。

This project aimed to develop efficient processes at a low cost to produce the gold nano dot array having 10nm level. The conclusions obtained from the project is the following three.Nano-dot arrays with a diameter of smaller than 100nm can be produced by a combination process of patterning by the nano plastic forming and self-organization by annealing.It is efficient to employ the nanoimprinting process to groove grid patterning in order to improve productivity of nano dot arrays. It was shown that nanodot arrays exhibit unique optical properties, and the potential for industrial applications as biosensors was shown.