Efficient method for ordered nano dot array fabrication by combination of machining and self-organization process

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This project aimed to develop efficient processes at a low cost to produce the gold nano dot array having 10nm level. The conclusions obtained from the project is the following three.Nano-dot arrays with a diameter of smaller than 100nm can be produced by a combination process of patterning by the nano plastic forming and self-organization by annealing.It is efficient to employ the nanoimprinting process to groove grid patterning in order to improve productivity of nano dot arrays. It was shown that nanodot arrays exhibit unique optical properties, and the potential for industrial applications as biosensors was shown.