Development of functional surface by nano plastic forming

本研究开发了一种纳米塑性成形的纳米/微加工新技术，并研究了一种利用纳米塑性成形开发功能表面的新表面技术。(1)研制了一种新型纳米成形装置，进行纳米成形试验。该设备由超精密级、称重传感器和超精密压印工具（模具）组成。工作台的运动由计算机控制，并可在计算机上编程成形载荷和压印位置。刀具采用单晶金刚石，经抛光和FIB加工而成。研制了几种压印工具，即刀口工具、平面工具、微结构工具、纳米结构工具、点状工具等。(2)采用刀口刀具，利用纳米成形装置分析了硬脆材料的临界深度。基于塑性理论和断裂力学，从理论上深入研究了材料的韧脆转变，探讨了影响临界深度的因素。结果表明，临界深度取决于工作材料的断裂韧性和屈服应力。(3)研究了单晶铜的微塑性变形特性。采用刀口刀压痕法对三种不同晶向的试样进行了测试。利用EBSD分析了压痕槽的截面，计算了压痕槽周围自旋矢量的分布。采用细观塑性有限元法模拟单晶铜的纳米成形过程。(4)提出了一种基于纳米成形和镀膜抛光的纳米加工新工艺。它可以高效地制造小型机械零件、微复合结构表面和微结构箔。(5)采用纳米成形技术制备功能表面。在玻璃板上制备纳米结构，并对其光学性能和摩擦性能进行了分析。结果表明，通过控制纳米成形条件可以控制表面性能。纳米成形技术是开发功能表面的有效手段。少

In this research, a new nano/micro fabrication technology by nano plastic forming method was developed, and a new surface technology that develops functional surface by using the nano plastic forming was studied.(1)A new nano forming device was developed to conduct nano forming test. The device consists of ultra precision stages, a load cell, and a ultra fine imprinting tool (mold). The motion of stages is controlled by a computer, and forming load and position of imprinting can be programmed on the computer. The tool is made of a single crystal diamond, and manufactured by polishing and FIB machining. Several kinds of imprinting tools, i.e. a knife edge tool, a flat tool, a micro structured tool, a nano structured tool, a point tool etc., were developed A tool is imprinted on the work material, and its structure is copied on the material..(2)The critical depth of hard brittle materials was analyzed with the nano forming device by using a knife edge tool. Ductile/brittle transition was … More studied theoretically based on plasticity theory and fracture mechanics, and effective factors on the critical depth was investigated. Results explained that the critical depth depends on the fracture toughness and yield stress of the work material.(3)Micro plastic deformation property of single crystal copper was studied. Three kinds of specimen of various crystal orientation was tested by knife edge tool indentation. Cross section of indent grooves were analyzed by EBSD, and distribution of spin vectors around the grooves were calculated. Meso plasticity FEM was developed to simulate nano forming process of single crystal copper.(4)A new nano fabrication process based on nano forming and plate coating and polishing was developed. It is efficient to manufacture small mechanical parts, micro composite structured surface, and micro structured foil.(5)Functional surfaces were developed by nano forming technique. Nano structures were fabricated on glass plates, and their optical property and friction property were analyzed. Results indicates surface properties can be controlled by controlling nano forming conditions. Nano forming technique is efficient to develop functional surfaces. Less