Development of highly efficient deep-UV wavelength-conversion devices with walk-off compensating structures

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We have realized a deep-UV laser, which is attractive for high-precision machining and measurement applications, by fabricating a newly-structured highly efficient wavelength-conversion device using a new method.One of popular UV-generating nonlinear-optical crystals, BBO, suffers from the walk-off effect which separates the generated UV beam from the input laser beam, drastically decreasing the conversion efficiency. We proposed a new structure which compensates for the walk-off effect, and fabricated the device using the room-temperature-bonding technique. We have then obtained twice the UV power of that from a bulk crystal. It is expected that one-order higher UV power can be obtained from the device with improved structures.