Analysis of tribology characteristics of asymmetric periodic fabricated surfaces with anisotropic etching process of silicon wafer

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We previously showed that microparts can be fed along an asymmetric microfabricated surface using simple planar symmetric vibrations. Microparts move in one direction because they adhere to the microfabricated surface asymmetrically. In the present work, we applied the etching process of single crystal silicon to develop higher accurate and uniform asymmetric fabricated surfaces. Using a silicon wafer with a plain orientation of (221), an asymmetric periodic structure is generated on its surface because the etching speed is different between forward and backward of the crystal face. We examined the applicability for microparts feeding by experiments. We also analyzed the micropart movement using a movement analysis microscopic system then assessed the stability of microparts feeding.