Development of a micro vibration energy harvesting device using silicon dioxide electret film including alkali ions

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This research focuses on a newly developed electret film that is made of silicon dioxide including potassium ions. We conducted experiments that aim control of charging property, and found that (1) the charging voltage is controllable, (2) the charging end detection is possible, (3) the charging voltage is measureable using electrostatic actuators, and (4) the maximum charging voltage is over 400V. We also fabricated a vibration energy harvesting device using the electret method and demonstrated LED illumination by 0.85 micro watts.In addition, we examined accelerated aging tests of the electret film and evaluated -1dB voltage decay time; resulting in the charging voltage will be maintained over 30000 year at room temperature.