Enhancement of piezoelectric properties by introducing heterogeneous structure

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Pb(Zr,Ti)O3 (PZT) thin films with some amounts of pores or Pt nanoparticles were prepared by chemical solution deposition and their piezoelectric properties were evaluated by atomic force microscopy (AFM). Film thickness was approximately 300 nm. Their microstructures were also investigated by scanning electron microscopy (SEM) and transmission electron microscopy (TEM). The amount of pores was adjusted by changing the speed of spin-coating. Finally, the densities of the PZT films were estimated to be 0.92-0.98. On the other hand, the amount of Pt nanoparticles was adjusted by changing the mixing ratios of precursor solutions to 0-9%. As a result, an effective piezoelectric constant d33,AFM estimated by the AFM was enhanced with increasing the amounts of pores or Pt nanoparticles. These results suggest that unstable lattices which were easily distorted with applying an electric field increased by introducing the heterogeneous structures.