Development of new measurement techniques for application of glow discharge optical emission spectroscopy to plasma-surface interaction studies

开发新的测量技术，将辉光放电发射光谱应用于等离子体-表面相互作用研究

• 批准号: 23560998
• 负责人: HATANO Yuji
• 金额: $ 3.24万
• 依托单位: University of Toyama
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Scientific Research (C)
• 财政年份: 2011
• 资助国家: 日本
• 起止时间: 2011 至 2013
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-23560998/
• 关键词: プラズマ・壁相互作用; 機器分析; 薄膜; 表面・界面; プラズマ応用; 水素同位体; ヘリウム; 深さ方向分析

Glow-discharge optical emission spectroscopy (GDOES) allows high resolution and rapid depth profiling of constituent elements in a solid specimen. These features are in principle suitable for the analysis of plasma-facing materials (PFMs) used in fusion devices. There are, however, special requirements for PFM analysis: (1) isotope analysis, (2) quantitative measurement of hydrogen isotopes, (3) helium detection, and (4) influence of hydrogen isotope content on sputtering rate of materials. This study has revealed that (1) resolution of diffraction grating in a commercial GDOES device is sufficiently high to separately detect H and D, (2) thin films of hydrogen absorbing materials are suitable as a standard sample for quantitative analysis of hydrogen isotopes, (3) helium detection is possible using high power, high pressure Ne plasma and (4) there is no significant influence of hydrogen isotope content on sputtering rate of carbon-hydrogen co-deposited films.

辉光放电光学发射光谱(GDOES)可以对固体样品中的组成元素进行高分辨率和快速的深度剖析。这些特性原则上适用于聚变装置中使用的面向等离子体的材料(PFM)的分析。然而，对PFM分析有特殊的要求：(1)同位素分析，(2)氢同位素的定量测量，(3)氦的检测，(4)氢同位素含量对材料溅射速率的影响。研究表明：(1)商用GDOES装置中的衍射栅具有足够高的分辨率来分别检测H和D；(2)吸氢材料薄膜适合作为氢同位素定量分析的标准样品；(3)利用高功率、高压的Ne等离子体可以检测氦；(4)氢同位素含量对碳氢共沉积薄膜的溅射速率没有显著影响。

项目成果

富山大学水素同位体科学研究センターホームページ

富山大学氢同位素科学研究中心主页

Analysis of hydrogen and deuterium by using glow discharge optical emission spectroscopy (GDOES)

使用辉光放电发射光谱 (GDOES) 分析氢和氘

• 发表时间: 2013
• 作者: Y. Hatano;V. Kh. Alimov
• 通讯作者: V. Kh. Alimov

Measurements of H, D and He in Plasma-Facing Materials by Glow-Discharge Optical Emission Spectroscopy

通过辉光放电发射光谱法测量等离子体表面材料中的 H、D 和 He

• 发表时间: 2011
• 作者: Yuji Hatano;Jie Shi;Naoaki Yoshida;Hironori Harada Tomonori Tokunaga;Yasuhisa Oya;Hirofumi Nakamura
• 通讯作者: Hirofumi Nakamura

Glow-Discharge Optical Emission Spectroscopy for Plasma-Surface Interaction Studies

用于等离子体-表面相互作用研究的辉光放电发射光谱

• 发表时间: 2011
• 作者: Y. Hatano;N. Yoshida;N. Futagami;H. Harada;T. Tokunaga;H. Nakamura
• 通讯作者: H. Nakamura