Digital encoders for curvilinear displacement and rotational angle based on periodic surface acoustic wave

传统的数字编码器很难提供所需的高精度光栅。在本研究中，由于位移测量是基于在被测物体表面产生的周期性表面声波（SAWs），因此不需要上述过程。制作了由压电衬底和数字间电极组成的声呐器件，用于产生和接收波长为0.16 mm的声呐器件。此外，通过测量延迟时间，证实了可以检测沿玻璃基板传播的声表面波。

It has been so difficult to provide highly precise gratings required for conventional digital encoders. In this study, no process above is needed because displacement measurement is based on periodic surface acoustic waves (SAWs) generated on a surface of measured object. SAW devices consisting of a piezoelectric substrate and interdigital electrodes were fabricated both for generating and for receiving the SAW with a wavelength of 0.16 mm. Moreover, it was confirmed to detect the SAW propagated along a glass substrate by measuring delay time.