Digital encoders for curvilinear displacement and rotational angle based on periodic surface acoustic wave

提供传统数字编码器所需的高精度光栅是非常困难的。在这项研究中，不需要上述过程，因为位移测量是基于在被测物体表面上产生的周期性表面声波（SAW）。制作了由压电基片和叉指电极组成的SAW器件，用于产生和接收波长为0.16 mm的SAW。此外，通过测量延迟时间，确认了检测沿着玻璃基片传播的SAW。

It has been so difficult to provide highly precise gratings required for conventional digital encoders. In this study, no process above is needed because displacement measurement is based on periodic surface acoustic waves (SAWs) generated on a surface of measured object. SAW devices consisting of a piezoelectric substrate and interdigital electrodes were fabricated both for generating and for receiving the SAW with a wavelength of 0.16 mm. Moreover, it was confirmed to detect the SAW propagated along a glass substrate by measuring delay time.