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Micro machining and measuring center for micro machine parts using parallel kinematics

采用并联运动学的微机械零件微加工和测量中心

基本信息

批准号：
12555040
负责人：
OIWA Takaaki
金额：
$ 7.36万
依托单位：
Shizuoka University
依托单位国家：
日本
项目类别：
Grant-in-Aid for Scientific Research (B)
财政年份：
2000
资助国家：
日本
起止时间：
2000 至 2002
项目状态：
已结题

项目摘要

This study proposed a micro coordinate measuring machine (micro CMM) based on a parallel mechanism instead of XYZ mechanism. Because the conventional CMM using XYZ mechanism consisting of three mutually orthogonal slide mechanism is not suitable for measurement with nano-order accuracy. This CMM is suited for precision measurement of the geometrical deviations of the micro parts with three dimensional profile. First, we performed the link configuration design using the error analysis by singular value decomposition. Obtained link configuration improves the moving accuracy and the measuring resolution. Moreover, we have designed the strut consisting of the prismatic joint, linear scale unit and the actuator. The inch-worm mechanism using piezoelectric actuators has been employed as the actuator of the strut. This struts also have a compensation device for joint motion errors, elastic displacements of the joints and links, and thermal deformations of the links. This device employs two rods connecting with the joints and a scale unit. The scale unit can measure the variation of the distance between the joints independently of the external load because the rods aren't subjected to the load. Moreover, temperature fluctuation has little effect on measured variation because the rods are made of Super Invar. This device is built in the experimental active prismatic joint of a coordinate measuring machine for micro parts. Experiments show that the device improves the stiffness and decreases the thermal expansion of the link.

提出了一种基于并联机构代替XYZ机构的微型坐标测量机。由于传统的三坐标测量机采用三个相互正交的滑块机构组成的XYZ机构，不适合纳米级精度的测量。该坐标测量机适用于微小型三维轮廓零件几何误差的精密测量。首先，我们使用奇异值分解的误差分析来执行链路配置设计。所获得的连杆结构提高了运动精度和测量分辨率。此外，我们还设计了由平移关节、线性标尺单元和执行机构组成的支撑机构。采用压电作动器的寸蜗杆机构作为支撑杆的作动器。该支柱还具有用于接头运动误差、接头和连杆的弹性位移以及连杆的热变形的补偿装置。该装置采用两个连杆连接关节和一个刻度单元。刻度单元可以测量接头之间的距离的变化，而不受外部载荷的影响，因为杆不受载荷的影响。此外，温度波动对测量变化的影响很小，因为棒是由超级因瓦合金。该装置内置于微型零件三坐标测量机的实验性主动棱柱关节中。实验表明，该装置提高了连杆的刚度，减小了连杆的热膨胀。