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Micro corrdinate measuring machine for micro mechanism using parallel kinematics

采用并联运动学的微型机构微型坐标测量机

基本信息

批准号：
11650151
负责人：
OIWA Takaaki
金额：
$ 2.43万
依托单位：
Shizuoka University
依托单位国家：
日本
项目类别：
Grant-in-Aid for Scientific Research (C)
财政年份：
1999
资助国家：
日本
起止时间：
1999 至 2000
项目状态：
已结题

项目摘要

This study proposed a new coordinate measuring machine (CMM) based on a parallel mechanism instead of XYZ mechanism. Because the conventional CMM using XYZ mechanism consisting of three mutually orthogonal slide mechanism is not suitable for measurement with nano-order accuracy. This CMM is suited for precision measurement of the geometrical deviations of the micro parts with three dimensional profile because the parallel mechanism has a number of advantages as follows. The motion error of the moving platform has little effect on the measured value, because the measuring point is in sensitive directions of the scale units. The truss structure has a high stiffness because its members are subjected to very few bending force. The systematic error produced by each of the scales is averaged with the other two. The small inertial mass enables high moving speed. First, we performed the link configuration design using the error analysis by singular value decomposition. Obtained link configuration improves the moving accuracy and the measuring resolution. Moreover, we have designed the strut consisting of the prismatic joint, linear scale unit and the actuator. The inch-worm mechanism using piezoelectric actuators has been employed as the actuator of the strut. The strut has been expanded and contracted by the inch-worm mechanism under the load of 4 N.In addition, full-close-controlled positioning using the scale unit has been performed. The settling time for 10 micrometer positioning was less than 0.1 second.

本研究提出了一种基于并联机构而不是XYZ机构的新型坐标测量机（CMM）。因为传统的坐标测量机采用由三个相互正交的滑动机构组成的XYZ机构，不适合纳米级精度的测量。该三坐标测量机适用于精密测量具有三维轮廓的微型零件的几何偏差，因为并联机构具有以下许多优点。由于测量点位于刻度单元的敏感方向，动平台的运动误差对测量值影响很小。桁架结构具有高刚度，因为其构件承受的弯曲力非常小。每个量表产生的系统误差与其他两个量表产生的平均值。惯性质量小，移动速度高。首先，我们使用奇异值分解的误差分析来进行链路配置设计。获得的链路配置提高了移动精度和测量分辨率。此外，我们还设计了由棱柱关节、线性标尺单元和执行器组成的支柱。采用压电致动器的英寸蠕虫机构被用作支柱的致动器。支柱通过英制蜗杆机构在 4 N 的载荷下伸缩。此外，还利用标尺单元进行了全闭环控制定位。 10微米定位的稳定时间小于0.1秒。