Development of U-shaped Microchannel for High Precise Fluid Measurement

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We have developed a microfabrication technique for three dimensional structures using grayscale lithography and a negative photoresist. In this project, we demonstrated fabrication of micro beam array with non-uniform thicknesses for wide range frequency selectivity. We also applied the technique to develop a microdevice for low voltage electroporation using field focusing and demonstrated the measurement of local electric field exerted to the cells on the microdevice.