3D Super-Resolution Imaging for High-Speed Defect Inspection by Using Active Spatial Control of Light

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First, we proposed the novel technique for the generation and control of 3D structured illumination based on 3D interference of multiple laser beams. Then, we performed numerical simulations for optimizing several parameters such as spatial position of multiple laser beams, incident angles and conditions of polarization of light. Actually, it was found that the 3D structured illumination with high spatial frequencies in all directions could be generated and controlled by phase shift of multiple laser beams. Furthermore, we developed the apparatus for the 3D structured illumination using 4 laser beams interference. As a result of a series ofexperiments, we confirmed the generation and precise control of the 3D structured illumination. In order to realize the 3D super-resolution by the proposed method, it is needed that 3D information of the specimen is reconstructed from obtained image information and given information of the structured illumination. By the series of numerical simulations based on Fourier optics, the 3D super-resolution was confirmed by using 13 obtained 3D images and 3D deconvolution technique.