Focus-Tunable ECF Microlens by Using MEMS Technology

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This research proposes a novel elastomer-based and liquid-filled tunable microlens by using an electro-conjugate fluid (ECF) jet and MEMS technology. Tuning an elastomer-based microlens is to change the geometry of the boundary determined by the control pressure of the chamber by using an ECF micropump inside the tunable microlens. A high power ECF micropump that consisted of triangular prism and slit electrode pairs was proposed and fabricated by MEMS technology. As advanced ECF micropumps, they were integrated for high performance by the serialization and parallelization, achieving output power density of the world top class. The prototypes whose ECF micropump were integrated and fabricated by MEMS technology were manufactured and experimentally investigated. The experimental results showed the feasibility of micro varifocal lens devices powered by ECF jet.