Investigation by Complementary Approach on Fluid-Surface Interaction from Molecular Scale

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To investigate the gas-surface interaction on non-metal surfaces widely used in the micro-technology, a novel measurement system for the thermal accommodation coefficient, which represents energy transfer between gas and surface, was proposed. Even though there were some troubles on a molecular beam scattering experimental apparatus, numerical analyses by the molecular dynamics method gave a qualitative characteristics on the gas-surface interaction. By setting appropriate conditions obtained from the numerical results, the successive measurements will lead to the understanding on characteristics of the interaction.