Fabrication of epoxy-based molecular permeable membrane and analysis of membrane characteristics using coarse-grained molecular dynamics simulation

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Biocompatible permeable membranes integrated with a microfluidic system, which allow the diffusion of biological molecules with certain molecular weight, are desirable in biomedical applications. This study reports on a molecular level study of the molecules permeability of epoxy-based chemically-amplified photoresists by employing a coarse-grained molecular dynamics simulation. For analyzing mechanical property and diffusion coefficient of molecular in photoresists, Kremer-Grest model with an extended angle bending potential was employed. The simulation results show the same tendency with the experimental results, and which suggests photoresist membrane can be used as permeable membranes with controllable permeability by varying lithography parameters.