Interaction dynamics of plasma fluctuations and nano interface properties

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Studies focused on reducing the dimensions of semiconductor structures1) to the nanometer regime have led to a fascinating class of novel materials that exhibit quantum confinement characteristics. For faster development of fabrication methods for nanomaterials, the effects of plasma fluctuations on the growth of nanoparticles in reactive plasmas must be taken into account because plasma fluctuations affect nanoparticles in dust plasmas. Therefore, I have investigated the effects of plasma fluctuation on the nano-interface properties. Nanoparticles grow more slowly for plasma fluctucations, which causes the density of nanoparticles to increase and their size to decrease. By the developed in-situ method, I have for the first time been able to determine the size distribution of nano-particles generated in a reactive plasma without ex-situ measurements.