Study of dimensional measurement of micro-hole by using a high-sensitivity probing system with a nanopipette ball probe

研制了一种用于微孔尺寸测量的新型探测系统。本研究使用的触笔由玻璃纳米吸管和微玻璃球组成。通过在玻璃纳米吸管边缘附着微球，直径小于10微米的笔尖可以从各个方向保持均匀的形状。利用由半月板层产生的相互作用力，采用剪切力检测的方法，可以实现笔尖与测量表面的接触检测。实验证明，所开发的探测系统能够利用纳米吸管球触头测量具有纳米分辨率和亚微米测量精度的尺寸测量。

A new type probing system has been developed for the dimansional measurement of micro-holes. The stylus used in this study is consisted of a glass nanopipette and micro glass sphere. By attaching the micro-sphere at the edge of the glass nanopipette, the stylus tip with the diameter of less than 10 micrometer can maintain the uniform shape from all directions.The contact detection between the stylus tip and the measuring surface can be realized by utilizing the method of shear-force detection which employ the interaction force owing to the meniscus layer. It has been verified that the developed probing system has the ability to measure the dimensional measurement with nanometric resolution and sub-micrometric measurement accuracy by using the nanopipette ball stylus.