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Data assimilation method based on physics-informed machine learning and its application to multiple simultaneous estimation of physical properties of coating films

基于物理信息机器学习的数据同化方法及其在涂膜物理性能多重同时估计中的应用

基本信息

批准号：
22K03909
负责人：
白鳥英
金额：
$ 2.58万
依托单位：
Tokyo City University
依托单位国家：
日本
项目类别：
Grant-in-Aid for Scientific Research (C)
财政年份：
2022
资助国家：
日本
起止时间：
2022-04-01 至 2025-03-31
项目状态：
未结题

来源：
https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-22K03909/
关键词：
PINN 液膜流れデータ同化位相シフト干渉法物性値測定膜厚ムラ

项目摘要

半導体デバイスやディスプレイのカラーフィルター等の微細加工プロセスでは、機能性樹脂と揮発性溶媒から成る液膜を基板に均一に塗布する際に種々の膜厚ムラが発生し、これが最終製品の寸法精度低下に直結する課題となっている。本研究では、この膜厚ムラを数値シミュレーションで予測する際に必要となる塗膜の物性値を、物理法則の機械学習法に基づいた新たなデータ同化法によって同定する方法の構築を目指している。具体的には、表面張力と粘性係数の複数の物性値を、膜厚分布という1種類の実測値から同時に同定する。初年度である2022年度はまず、構築を目指す技術の根幹部分となる物理法則の機械学習に基づくデータ同化法について、基本部分のプログラムを実装し、人工データを用いた双子実験によって原理的な妥当性を検証した。実際に測定した膜厚分布を用いたデータ同化システムを構築して測定精度と適用範囲を明らかにするために、液膜の膜厚分布を面情報として高いサンプルレートで取得できるような実験・計測方法を設計・実装した。具体的には、レーザーを用いた位相シフト干渉法によって、直径25mm程度の面内の膜厚分布を同時に取得できる設計とした。既往の位相シフト干渉法では、膜厚分布に応じた干渉を発生させた後に、屈折光学型のビームスプリッターと波長板を複数用いて段階的に位相シフトさせるが、本研究では回折光学素子によるビームスプリッターによって同時に光軸を複数に分岐させ、分岐後の各ビームに対して異なる位相シフト量となるように面付した位相差フィルムを通すことで，位相差の異なる複数の干渉縞を1枚の画像として1台の高速カメラで撮影することで膜厚の時空間分布を十分な分解能で取得できるようにした。測定した膜厚分布については、代表者が保有する既存の白色干渉型膜厚計による計測値と比較して妥当性を検証した。

Micromachining equipment such as micromachining equipment, functional grease solvent, liquid film substrate, uniform distribution of film thickness, high precision, high precision, etc. In this study, the thickness of the film, the film thickness, the film thickness, The specific temperature, the surface force, the viscosity number, the complex number, the physical property, the film thickness distribution, and the film thickness distribution are determined at the same time. In the year 2022, the target of the year 2022 refers to the principles of physical law in the root of the technical department, the mechanical science, the assimilation method, the basic part, and the proper use of the principles of Gemini equipment and artificial equipment. For international measurement of film thickness distribution, it is necessary to assimilate the accuracy of the measurement of film thickness distribution, to determine the accuracy of measurement accuracy, to determine the accuracy of the measurement of film thickness distribution, to determine the accuracy of the measurement of film thickness distribution, to determine the accuracy of the measurement of film thickness distribution, to determine the accuracy of the measurement of film thickness distribution, to determine the accuracy of the measurement of film thickness distribution, to determine the accuracy of the measurement of film thickness distribution, to determine the accuracy of the measurement of film thickness distribution, to determine the accuracy of measurement accuracy, to determine the accuracy of measurement accuracy, to determine the accuracy of measurement accuracy, to determine the accuracy of measurement accuracy, to determine the accuracy of measurement accuracy, to determine the accuracy of measurement accuracy, and to determine the accuracy of measurement of film thickness distribution. The measurement of the film thickness distribution in the plane of the 25mm degree of diameter is obtained at the same time by using the phase analysis method and the in-plane film thickness distribution method. In the past, the phase analysis method, the film thickness distribution analysis method, the refractive optical wave length plate and the optical wave length plate were used in the previous phase interferometry, the film thickness distribution was measured in the past, the film thickness distribution was measured in the previous phase interference method, the film thickness distribution was measured in the second phase, and the wave length of the refractive optical wave length plate was measured in this study. After the division, there is a difference in phase, phase and phase. The phase difference is very different from each other. One portrait, one high-speed video camera, the film thickness, the time and space distribution, the time and space distribution can be easily decomposed. To determine the thickness distribution of the film, the representative will retain the existing white dry film thickness measurement to compare the appropriateness of the film thickness.