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Preparation of lanthanide and actinide compounds by CVD method using volatile beta-diketone chelates

挥发性β-二酮螯合物CVD法制备镧系和锕系化合物

基本信息

批准号：
04640575
负责人：
AMANO Ryohei
金额：
$ 1.28万
依托单位：
Kanazawa University
依托单位国家：
日本
项目类别：
Grant-in-Aid for General Scientific Research (C)
财政年份：
1992
资助国家：
日本
起止时间：
1992 至 1993
项目状态：
已结题

项目摘要

Volatile metal chelates have been used in a wide of applications as fuel additives and catalysts, as metal vapor sources, and in trace metal analysis.There is growing interest in volatile metal b-diketone chelates as vapor source for chemical vapor deposition(CVD). In this work, we are interested in CVD method using volatile beta-diketone chelates with 2,2,6,6, -tetramethyl-3,5-haptanedione(thd), and developed the new preparation method of the metal oxide, sulfide and fluoride films.(1). Preparation of lanthanide fluoride and chloride films was studied by chemical vapor deposition(CVD) using Ln(thd)_3 (Ln=lanthanide(III) ; thd=2,2,6,6-tetramethyl-3,5-heptanedionato ligand) and Y(thd)_3 with gas mixture systems of CF_2Cl_2 (difluorodichloromethane)/O_2 and CF_2Cl_2/H_2.Two kinds of fluorides, LnOF oxyfluoride and LnF_3 trifluoride were obtained separately along a CVD tube by the reaction of Ln(thd)_3 chelates with CF_2Cl_2/O_2 gas system. The chemical characteristics of the CVD products were considered from the points of thermochemical view.(2). We here describe some characteristics of (2,2,6,6, -retramethyl-3,5-heptanedionato) thallium(I), and preliminary experiments in the CVD between this chelate and some reactant gases. The precipitation was isolated by filtration, allowed to dry, and was purified by sublimation in vacuum. In conclusion, the present Tl(thd) chelate is useful and porential as a thallium vapor source for CVD and gas-phase reaction investigations.

挥发性金属螯合物作为燃料添加剂、催化剂、金属蒸气源以及痕量金属分析等有着广泛的应用，其中挥发性金属b-二酮螯合物作为化学气相沉积（CVD）的蒸气源的研究越来越受到人们的关注。本论文主要研究了利用挥发性β-二酮与2，2，6，6-四甲基-3，5-庚二酮（thd）的螯合物进行化学气相沉积（CVD）的方法，并开发了制备金属氧化物、硫化物和氟化物薄膜的新方法。（一）.采用化学气相沉积（CVD）法，以Ln（thd）_3为原料，研究了镧系氟化物和氯化物薄膜的制备（Ln=镧系元素（III）; thd= 2，2，6，6-四甲基-3，5-庚二酮配体）和Y（thd）_3与CF_2Cl_2的混合气体体系（二氟二氯甲烷）/O_2和CF_2Cl_2/H_2。利用Ln（thd）_3螯合物与CF_2Cl_2/O_2气体体系反应，沿CVD管沿着分别得到LnF氟氧化物和LnF_3三氟化物。从热化学的观点考虑了CVD产物的化学特性。（二）、本文介绍了（2，2，6，6-反四甲基-3，5-庚二酮）铊（I）的一些性质，以及这种螯合物与某些反应气体的化学气相沉积的初步实验。通过过滤分离沉淀，使其干燥，并通过真空升华纯化。总之，本发明的Tl（thd）螯合物可用作CVD和气相反应研究的铊蒸气源。