Experimental Investigation of the Attainable Limiting Surface Roughness in the Ultra Precision Cutting of Various Kinds of Materials

本研究旨在通过实验研究各种材料在超精密加工中可达到的极限表面光滑度。通过实验研究了各种材料的面车削加工条件与表面粗糙度之间的关系。采用金相显微镜和扫描电子显微镜对加工表面进行了观察，并用WYKO和AFM对表面粗糙度进行了测量。主要结果如下：1)超精密面切削加工表面由微孔、划痕、材料晶界、咬边半径进给转录槽等微观缺陷和机床特性及环境条件如室温、底座振动等引起的微波波纹度组成。2)在临界进给速度范围内，进给速度越小，表面粗糙度越小。另一方面，在临界进给上，表面粗糙度收敛到终端常数…3)切削速度和切深对可获得的极限表面平整度影响不大。4)可获得的极限表面平整度取决于被加工材料，范围为9 nm(Rmax)到5 nm(Rmax)，不包括Al-Mg合金中形成的微缺陷。5)晶界台阶和咬边形状的微观湍流分别小于5 nm和2 nm。6)在对Ni-P非晶态材料和金的极限超精密加工中，没有观察到晶界台阶的形成，几乎没有观察到晶界台阶的形成。结果表明，这些材料的表面粗糙度比铝合金和OFHC铜等其他材料要小。7)根据对500 nm正方形极微小区域的观察，除金以外的各种工件的超精密翻面表面都由大量的颗粒组成。8)在不锈钢的超精密切割中，即使在良好的切割条件下，咬合口的磨损也是剧烈的。较少

This research aims to investigate experimentally the attainable limiting surface smoothness in the ultra precision cutting of various kinds of materials. The relationship between the cutting condition and the surface roughness for face-turning of various kinds of materials is investigated experimentally. The turned surface is observed with micrograph and SEM.The surface roughness is measured with WYKO and AFM.The main results obtained are as follows :1) The ultra precision face-turned workpiece surface consists of the micro-defect such as micro-hole and scratch, the grain boundary of material, the feed transcription groove of bite edge radius and the micro-waviness due to the machine characteristics and circumstance conditions such as the room temperature, floor vibration and so on.2) Within the range of a critical feed rate, the surface roughness becomes small as the feed rate is small. Over the critical feed, on the other hand, the surface roughness converges into a terminal constant … More value.3) The cutting speed and depth of cut have little influence on the attainable limiting surface smoothness.4) The attainable limiting surface smoothness is dependent on the workpiece material and range from 9nm (Rmax) to 5nm (Rmax), excluding the micro-defect formed in Al-Mg alloy.5) The grain boundary step and micro-turbulence of bite edge shape is below 5nm and 2nm, respectively.6) In the limiting ultra-precision cutting of Ni-P amorphous material and gold, no and little formation of the grain boundary step is observed. As the result, the surface roughness of those materials becomes smaller than other materials such as Al alloy and OFHC copper.7) According to the observation for the extremely micro-area of 500nm square, the ultra-precision face-turned surface of various kinds of work pieces excluding the gold consists of a plenty of particles. In the gold, on the other hand, the cutting grooves are observed.8) In the ultra precision cutting of the stainless steel, the bite edge wear is confirmed to be aggressively even in the good cutting condition for it. Less