Experimental Investigation of the Attainable Limiting Surface Roughness in the Ultra Precision Cutting of Various Kinds of Materials

本研究旨在探讨各种材料超精密切削时所能达到的极限表面光洁度。对不同材料端面车削时切削条件与表面粗糙度的关系进行了实验研究。结果表明：1）超精密端面车削工件表面由微孔、划痕等微观缺陷、材料晶界、刃口半径的进给转录槽以及由机床特性和环境条件（如室温、地板振动等）引起的微波纹等组成; 2）在临界进给速度范围内，进给速度越小，表面粗糙度越小。另一方面，在临界进给量以上，表面粗糙度收敛为终端常数 ...更多信息 3）切削速度和切削深度对可达到的极限表面光滑度影响不大; 4）可达到的极限表面光滑度取决于工件材料，范围在9 nm（Rmax）~ 5 nm（Rmax）之间，不包括Al-Mg合金中形成的微缺陷; 5）晶界台阶和微湍流的咬边形状在5 nm和2 nm以下，6）在Ni-P非晶材料和金的极限超精密切削中，没有观察到或很少观察到晶界台阶的形成。结果，这些材料的表面粗糙度变得比其他材料，如铝合金和OFHC铜更小。7）根据对500 nm正方形的极微区域的观察，除金之外的各种工件的超精密端面车削表面由大量的颗粒组成。另一方面，在黄金中，切削槽是弯曲的。8）在不锈钢的超精密切削中，即使在良好的切削条件下，咬合边缘磨损也被证实是积极的。减

This research aims to investigate experimentally the attainable limiting surface smoothness in the ultra precision cutting of various kinds of materials. The relationship between the cutting condition and the surface roughness for face-turning of various kinds of materials is investigated experimentally. The turned surface is observed with micrograph and SEM.The surface roughness is measured with WYKO and AFM.The main results obtained are as follows :1) The ultra precision face-turned workpiece surface consists of the micro-defect such as micro-hole and scratch, the grain boundary of material, the feed transcription groove of bite edge radius and the micro-waviness due to the machine characteristics and circumstance conditions such as the room temperature, floor vibration and so on.2) Within the range of a critical feed rate, the surface roughness becomes small as the feed rate is small. Over the critical feed, on the other hand, the surface roughness converges into a terminal constant … More value.3) The cutting speed and depth of cut have little influence on the attainable limiting surface smoothness.4) The attainable limiting surface smoothness is dependent on the workpiece material and range from 9nm (Rmax) to 5nm (Rmax), excluding the micro-defect formed in Al-Mg alloy.5) The grain boundary step and micro-turbulence of bite edge shape is below 5nm and 2nm, respectively.6) In the limiting ultra-precision cutting of Ni-P amorphous material and gold, no and little formation of the grain boundary step is observed. As the result, the surface roughness of those materials becomes smaller than other materials such as Al alloy and OFHC copper.7) According to the observation for the extremely micro-area of 500nm square, the ultra-precision face-turned surface of various kinds of work pieces excluding the gold consists of a plenty of particles. In the gold, on the other hand, the cutting grooves are observed.8) In the ultra precision cutting of the stainless steel, the bite edge wear is confirmed to be aggressively even in the good cutting condition for it. Less