Trial Manufacturing of Ultra-high Removal Nanometer-Smoothness Grinding Machine Based on New Concept

近年来，高效率生产高质量零件的迫切需要是高磨削率的超光滑磨削方法，它可以加工出与抛光形成的平整度几乎相同的光洁度。从这一角度出发，在以前的报告中，从理论上和实验上讨论了横向磨削可以达到的极限光滑度的存在。在此基础上，提出了基于这一新概念的超光滑磨削新方法，并确定该方法可用于近超光滑表面的精加工。为了使磨削率更高，首先分析了超光滑磨削方法在平面磨削情况下的磨削率，但水平表面磨削的磨削率较低。在此基础上，设计并试制了新型立式平面磨床。两种v-…更多的立式磨床被制造出来。一种是由传统的立式磨床改造而成的圆盘式工作台。另一种是新制造的，具有超高回转主轴和四柱，用于高磨削率磨削和高刚性机构。结合生产实际，利用卧式磨床对磨削液的补给效果和超高切深磨削进行了基础研究。此外，为了快速、准确地检测砂轮表面状态，开发了砂轮表面自动图像处理系统。主要结论如下：(1)与卧式磨床相比，新研制的两种立式磨床更有利于超光滑磨削，磨削率更高。(2)磨削液的种类和稀释度对碳化硅陶瓷的超光滑磨削有较大的影响。(3)与传统磨削方法相比，新开发的超光滑磨削方法可以获得更高的超光滑磨削切深。(4)新开发的砂轮表面状态自动图像处理系统可用于定量跟踪一系列磨削操作过程中的砂轮状态，即修整过程，修整过程，修整过程和磨削过程包括磨削过程中发生的载荷。较少

The high removal rate ultra-smoothness grinding method which can finish to almost the same smoothness formed by polishing has been recently desired strongly for high efficiency production of high quality components. From the point of view, in the previous report, the existing of limiting smoothness, which can be attained in traverse grinding is discussed theoretically and presented experimentally. On the results, the newly devised ultra-smoothness grinding method based on the new concept is proposed and ascertained to be useful for finishing near the ultra-smoothness surface. The removal rate obtained using horizontal surface grinding, however, is small though the rate is larger than lapping and polishing.To make the removal rate much larger, in the research, the rate in ultra-smoothness grinding method is analyzed firstly in the case of horizontal surface grinding. Based on the analysis, the new type of vertical surface grinder is designed and manufactured on trial. The two kinds of v … More ertical grinders are manufactured. One is reconstructed from the conventional vertical grinder with the disc type of table. The other is newly manufactured and has the ultra-high revolution spindle and the four columns for the high removal rate grinding and high rigid mechanism. Accompanying with the manufacturing, the basic research on the supplying effect of grinding fluid and ultra-high depth of cut of grinding is investigated using the horizontal grinder. In addition, in order to examine the grinding wheel surface condition quickly and precisely, the automatic image processing system is developed. The main conclusions are as follows :(1)Comparing with the horizontal grinder, the two types of the newly manufactured vertical is useful for the ultra-smoothness grinding in much higher removal rate.(2)The type and dilution of grinding fluid have the large influence on the ultra-smoothness grinding of silicon carbide ceramic.(3)Comparing with the conventional grinding method, the newly developed ultra-smoothness grinding method enables the much higher depth of cut of ultra-smoothness grinding.(4)The newly developed automatic image processing system for evaluating the wheel surface condition is available for pursuing quantitatively the wheel conditions in a series of grinding operation processes, that is, truing process, dressing process and grinding process including the grinding process in the occurrence of loading. Less