Trial Manufacturing of Ultra-high Removal Nanometer-Smoothness Grinding Machine Based on New Concept

高去除率的超光洁度磨削方法，其光洁度几乎与抛光抛光的光洁度相当，是近年来高效生产高质量零件的迫切需要。从理论上讨论了横磨过程中存在的极限光滑度，并进行了实验研究。在此基础上，提出了基于新概念的超光滑磨削方法，并确定了该方法可用于超光滑表面附近的精加工。水平表面磨削的去除率虽然大于研磨和抛光，但较小。为了使去除率更大，在研究中，首先分析了水平面磨削情况下超光滑磨削方法的去除率。在此基础上，设计并试制了新型立式平面磨床。更多的立式磨床被制造出来。一种是用圆盘式工作台改造传统的立式磨床。另一种是新制造的，具有超高转速主轴和四柱的高去除率磨削和高刚性机构。在制造的同时，利用卧式磨床对磨削液的供给效果和磨削的超高切削深度进行了基础研究。此外，为了快速、准确地检测砂轮表面状况，开发了自动图像处理系统。主要结论如下：(1)与卧式磨床相比，新研制的两种立式磨床可用于超光滑磨削，去除率明显提高。(2)磨削液的种类和稀释度对碳化硅陶瓷的超光滑磨削影响较大。(3)与传统磨削方法相比，新开发的超光滑磨削方法可以实现更高的超光滑磨削深度。(4)新开发的砂轮表面状况评价自动图像处理系统，可定量跟踪砂轮在一系列磨削操作过程中的状况，即修整过程、修整过程和磨削过程，包括发生加载的磨削过程。少

The high removal rate ultra-smoothness grinding method which can finish to almost the same smoothness formed by polishing has been recently desired strongly for high efficiency production of high quality components. From the point of view, in the previous report, the existing of limiting smoothness, which can be attained in traverse grinding is discussed theoretically and presented experimentally. On the results, the newly devised ultra-smoothness grinding method based on the new concept is proposed and ascertained to be useful for finishing near the ultra-smoothness surface. The removal rate obtained using horizontal surface grinding, however, is small though the rate is larger than lapping and polishing.To make the removal rate much larger, in the research, the rate in ultra-smoothness grinding method is analyzed firstly in the case of horizontal surface grinding. Based on the analysis, the new type of vertical surface grinder is designed and manufactured on trial. The two kinds of v … More ertical grinders are manufactured. One is reconstructed from the conventional vertical grinder with the disc type of table. The other is newly manufactured and has the ultra-high revolution spindle and the four columns for the high removal rate grinding and high rigid mechanism. Accompanying with the manufacturing, the basic research on the supplying effect of grinding fluid and ultra-high depth of cut of grinding is investigated using the horizontal grinder. In addition, in order to examine the grinding wheel surface condition quickly and precisely, the automatic image processing system is developed. The main conclusions are as follows :(1)Comparing with the horizontal grinder, the two types of the newly manufactured vertical is useful for the ultra-smoothness grinding in much higher removal rate.(2)The type and dilution of grinding fluid have the large influence on the ultra-smoothness grinding of silicon carbide ceramic.(3)Comparing with the conventional grinding method, the newly developed ultra-smoothness grinding method enables the much higher depth of cut of ultra-smoothness grinding.(4)The newly developed automatic image processing system for evaluating the wheel surface condition is available for pursuing quantitatively the wheel conditions in a series of grinding operation processes, that is, truing process, dressing process and grinding process including the grinding process in the occurrence of loading. Less