Development of Piezoelectric Actuator by Feedback of Induced Charge

感应电荷反馈压电促动器的研制

• 批准号: 09650282
• 负责人: FURUTANI Katsushi
• 金额: $ 2.18万
• 依托单位: Toyota Technological Institute
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Scientific Research (C)
• 财政年份: 1997
• 资助国家: 日本
• 起止时间: 1997 至 1998
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-09650282/
• 关键词: piezoelectric element; induced charge; positioning; hysteresis; inverse transfer function compensation; noise reduction; parallel mechanism; atomic force microscope; 運動精度; フィードバック; 電荷制御; 状態認識; センシング

This research aims to estimate displacement and generated force of a piezoelectric element (piezo) by using induced charge caused by internal charge to reduce the hysteresis of the piezo. Miniaturization of devices is expected by this method because additional elements are very small. A control method using the induced charge is established after basic performance of the induced charge is measured in 1997 and a precise positioning device is developed in 1998.(1)[Measurement of displacement and force generated]The relationship between induced charge and the displacement of a piezo is measured. The hysteresis of the displacement of the piezo to the induced charge and to applied voltage is also measured. The linearity of the induced charge to the displacement is much better than the linearity of the applied voltage.(2)[Precise positioning]The positioning performance by induced charge feedback control (ICFC) is compared with open loop control and displacement feedback control. The displacement can be controlled by the ICFC as well as by the displacement feedback control. The. displacement is controlled by combining the ICFC with inverse transfer function compensation for 10 seconds.(3)[Design of positioning table with parallel mechanism]A Stewart platform type device with six degrees of freedom is developed for precise positioning. It measures 160xl60x85mm. The movable range of a positioning table is 100x100x10mum. Its resonance frequencies are 50 Hz in the x and y directions and 190 Hz in the z direction. A noise from power line is reduced by an active noise reduction method.(4)[Application to atomic force microscope (AFM)]The pitching error of the positioning table is 10 times smaller than a tube type piezoelectric element. The repeatablitity of the z motion is 16 nm in the measurement of force curves. An AFM with good linearity can be obtained.

本研究旨在利用内部电荷引起的感应电荷来减少压电元件的磁滞，从而估计压电元件（piezo）的位移和产生的力。由于附加元件非常小，因此通过这种方法可以实现器件的小型化。 1997年测量了感应电荷的基本性能后，建立了利用感应电荷的控制方法，并于1998年开发了精确定位装置。 (1)[测量位移和产生的力]测量感应电荷与压电体位移之间的关系。还测量压电元件相对于感应电荷和施加电压的位移滞后。感应电荷对位移的线性度远优于外加电压的线性度。(2)[精确定位]将感应电荷反馈控制(ICFC)的定位性能与开环控制和位移反馈控制进行比较。位移可以通过 ICFC 以及位移反馈控制来控制。这。通过ICFC与逆传递函数补偿相结合10秒来控制位移。(3)[并联机构定位工作台设计]开发了六自由度Stewart平台式装置，实现精确定位。尺寸为 160xl60x85mm。定位工作台的可移动范围为100x100x10mum。其共振频率在 x 和 y 方向为 50 Hz，在 z 方向为 190 Hz。通过主动降噪方法降低来自电源线的噪声。(4)[原子力显微镜(AFM)的应用]定位台的俯仰误差比管型压电元件小10倍。在力曲线测量中，z 轴运动的重复性为 16 nm。可以获得具有良好线性的AFM。

项目成果

古谷克司他: "誘導電荷のフィードバックによる圧電素子の変位制御" 精密工学会誌. (掲載決定).

Katsuji Furuya 等人：“通过感应电荷的反馈控制压电元件”，日本精密工程学会杂志（出版）。

Katsushi Furutani et al.: "Displacement Control of Piezoelectric Element by Feedback of Induced Charge" Nanotechnology. Vol.9, No.2. 93-98 (1998)

Katsushi Furutani 等人：“通过感应电荷反馈控制压电元件的位移”纳米技术。

Katsushi Furutani et al.: "Displacement Control of Piezoelectric Element by Induced Charge Feedback [in Japanese]" Journal of the Japan Society for Precision Engineering. vol.64, No.4. 562-566 (1998)

Katsushi Furutani 等人：“通过感应电荷反馈进行压电元件的位移控制[日语]”日本精密工程学会杂志。

古谷克司ほか: "誘導電荷のフィードバックによる圧電素子の変位制御" 精密工学会誌. 64巻4号. 562-566 (1998)

K. Furuya 等人：“通过感应电荷的反馈来控制压电元件”，日本精密工程学会杂志，第 64 卷，第 4 期，562-566（1998 年）。