Design of Highly Accurate Linear Carriage Guided by Laser Beam Straight Datum and Its Application for Profile Measurement and Machining

激光束直线基准引导高精度直线导轨设计及其在轮廓测量与加工中的应用

• 批准号: 09555045
• 负责人: SHIMADA Shoichi
• 金额: $ 7.23万
• 依托单位: Osaka University
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Scientific Research (B)
• 财政年份: 1997
• 资助国家: 日本
• 起止时间: 1997 至 1998
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-09555045/
• 关键词: straight datum; laser beam datum; directional stability; beam locus straightness; tracking accuracy; straight motion mechanism; straightness measurement; flatness measurement; レーザービーム; 追尾性; 形状測定

By the computer simulation based on diffraction theory, it is proved that if beam intensity with angular misalignment of resonant mirror or misalignment of both center of resonant mirror and capillary tube is more than 1/4 the intensity of ideal resonator at Fraunhofer diffraction region, locus straightness of beam center is less than 1 nm per 1 m.Tracking accuracy of beam center of QPD decline as increase of misalignment of resonator. However, using QPD combined aperture for high accurate alignment of resonant mirror, it is shown that tracking accuracy is possible to be less than 1 nm per 1 m. It is shown that the motional accuracy of the end of displacement sensor mounted, with the optimum place to the center of QPD, on the linear carriage under posture control is equivalent to the stability of the laser beam straight datum.Moving vacuum beam path using a bellows and a vacuum system which controls fluctuation by air flow in the beam path, with working distance of 1 m is designed and built, then improves stability of beam position and direction. Directional stabilized He-Ne laser with outer resonant mirror supported by low coefficient thermal expansion is designed and built. Evaluating directional stability using vacuum beam path at thermostatic atmosphere, it is confirmed that horizontal and vertical directional stability of laser beam are 32 nrad and 37 nrad for 200 second.By measuring surface profile using the displacement sensor mounted on the linear carriage, it is confirmed that the measuring accuracy is equivalent to the stability of the laser beam straight datum. The plane is made from crossed two axes of ultra high precision straight motion mechanism with directional stabilized laser beam as straight datum. Ultra high precision flatness measuring method using the plane as plane datum is proposed.

通过基于衍射理论的计算机模拟，证明了当谐振镜角偏转或谐振镜与毛细管中心偏转的光束强度大于理想腔在夫琅和费衍射区光强的1/4时，光束中心的轨迹直线度小于1 nm/1m，QPD的光心跟踪精度随谐振腔偏移量的增加而下降。利用QPD组合孔径对谐振镜进行高精度对准，跟踪精度可能小于1 nm/1m。研究表明，在姿态控制下，安装在直线小车上的位移传感器端部在QPD中心的最佳位置，其运动精度相当于激光光束直线基准的稳定性。设计并搭建了工作距离为1m的波纹管真空光路和利用光路中气流控制波动的真空系统，提高了光束位置和方向的稳定性。设计并制作了低系数热膨胀支撑外谐振镜的定向稳频He-Ne激光器。利用真空光路在恒温大气中进行方向稳定性评价，确定了200秒内激光光束的水平方向稳定度为32nrad，垂直方向稳定度为37nrad；通过安装在直线小车上的位移传感器测量表面轮廓，证实了测量精度与激光光束直线基准的稳定度相当。该平面是以定向稳定激光为直线基准的超高精度直线运动机构的两轴交叉而成。提出了以平面为平面基准的超高精度平面度测量方法。

项目成果

冨田 彰、島田尚一、打越純一、森田端穂、井川直哉、小村明夫: "方向安定化レーザービームを直線基準とした高精度形状測定"1998年度精密工学会春季大会学術講演会講演論文集. 506-506 (1998)

Akira Tomita、Shoichi Shimada、Junichi Uchikoshi、Hataho Morita、Naoya Ikawa、Akio Komura：“使用定向稳定激光束作为直线参考的高精度形状测量”1998 年日本精密工程学会春季会议论文集 506-。 506（1998）

島田尚一、打越純一、有元孝太、小村明夫: "直線基準のための方向安定化レーザの開発 -ナノスケールの直線基準としてのレーザ共振器の条件-"1999年度精密工学会春季大会学術講演会講演論文集. 456-456 (1999)

Shoichi Shimada、Junichi Uchikoshi、Kota Arimoto、Akio Komura：“用于线性基准的定向稳定激光器的开发-激光谐振器作为纳米级线性基准的条件-”1999年日本精密工程学会春季会议学术讲座会议论文集456-456。 (1999)

冨田 彰、島田尚一、打越純一、森田瑞穂、井川直哉、小村明夫: "方向安定化レーザービームを直線基準とした高精度形状測定" 1998年度精密工学会春季大会学術講演会講演論文集. K39-K39 (1998)

Akira Tomita、Shoichi Shimada、Junichi Uchikoshi、Mizuho Morita、Naoya Ikawa、Akio Komura：“使用定向稳定激光束作为直线基准的高精度形状测量”1998年日本精密工程学会春季会议学术会议论文集。 K39-K39 (1998)

A. Tomita, S. Shimada J. Uchikoshi, M. Morita, N. Ikawa and A. Komura: "High Accurate Profile Measurement Using Laser Beam as Straight Datum, Proc. 1998 JSPE Spring Meeting"Proc. 1998 JSPE Spring Meeting. 506 (1998)

A. Tomita、S. Shimada J. Uchikoshi、M. Morita、N. Ikawa 和 A. Komura：“使用激光束作为直线基准的高精度轮廓测量，Proc. 1998 JSPE Spring Meeting”Proc。

S. Shimada, J. Uchikoshi, A. Arimoto and A. Komura: "Development of Directional Stabilized Laser Beam for Straight Datum (Condition of Laser Resonator as Nano-scale Straight Datum), Proc. 1999 JSPE Spring Meeting"Proc. 1998 JSPE Spring Meeting. 456 (1999)

S. Shimada、J. Uchikoshi、A. Arimoto 和 A. Komura：“用于直线基准的定向稳定激光束的开发（激光谐振器作为纳米级直线基准的条件），Proc. 1999 JSPE Spring Meeting”Proc。