Development of Rapid Detection and Evaluation System for Inner and Narrow Defects in Fine Ceramics

点击翻译按钮获取中文摘要

The scanning detection system for a narrow crack on a ceramic plate has been developed. When a laser spot is illuminated on a ceramic plate, the laser is diffused within the ceramics and interrupted by the crack. The crack is detected automatically by detecting the difference of irradiants on each side of crack.In the experimental apparatus, the laser spot is scanned with a polygon mirror and the distribution of irradiant on the ceramics is detected with a photo-mulutiplier tube, The results can be summarized as follows(1) The cracks of 0.5mum width in alumina or PZT substrate can be detected automatically at an S/N ratio of 2 by detecting the difference of irradi-ants on each side of crack.(2) The cracks with the length over 0.1 mm can be detected, However, only the crack with the length over 0.6 mm must be detected in order to separate the cracks from an impurity or void.(3) The method for detecting the narrow cracks which exist in a patterned ceramic plate was developed. The in-process inspection in a manufacturing process was realized by this technology.