Study on new stereo-lithography system with excimer laser
Study on new stereo-lithography system with excimer laser
批准号:
09555218
负责人:
SATOH Saburoh
金额:
$7.62万
依托单位:
依托单位国家:
日本
项目类别:
Grant-in-Aid for Scientific Research (B)
财政年份:
1997
资助国家:
日本
项目状态:
已结题
起止时间:
1997 至 1999
中文摘要
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英文摘要
In this study, we investigated a new type of laser stereo-lithography system with XeCl Excimer laser which wavelength was 308nm. In conventional systems, continuous wave Ar ion (351nm/364nm) and He-Cd (325nm) lasers were used as an ultraviolet (UV) light source, which functioned a small point pattern maker of 0.2mm in diameter. On the other hand, a new system proposed us with excimer laser could dramatically reduce the manufacturing time, because laser output power was high enough and beam size was bigger (10mm x 20mm) compare than the conventional ones. Therefore we also investigated a new technique, how to use the big size and high power excimer laser beam efficiently. Moreover we studied an excimer lamp for a low-cost UV light source.For the laser stereo-lithography, XeCl excimer laser was adapted to improve the utilization efficiency of laser energy. Because of the beam uniformity was made better with a homogenizer, the quantity of hardened resin per laser energy was increased compare than that of without a homogenizer. With this method a simple 3D object was created, and it was proved that XeCl excimer laser was possible to apply for the stereo-lithography.On the other hand, because of its excellent output efficiency, XeCl excimer lamp and N2 laser were one of a candidate of lower-cost stereo-lithography equipment, which allowed down sizing of the power supply and lamp head, and air-cooling. In view of this, attempts were made to develop special design cylindrical tubes with optical fiber system as the UV light source. Consequently, fiber transmission efficiency of excimer lamp was too low because of its high beam divergence. But the N2 laser was good enough to apply for the lower-cost stereo-lithography system.
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佐藤三郎,山部長兵衛他: "XeClエキシマレーザ/ランプを用いた光造形装置の検討" レーザー学会学術講演会第19回年次大会. 29aVI2. 93 (1999)
Saburo Sato、Chobei Yama 等人:“使用 XeCl 准分子激光/灯的立体光刻设备的研究”第 19 届日本激光学会年会 29aVI2(1999)。
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通讯作者:
K.Yokagawa, S.Satoh, C.Yamabe et al.: "A study on mask type stereo-lithography with XeCl excimer laser (in Japanese)"Reports on Topical Meeting of The Laser Society of Japan. No. RTM-97-46. 39-43 (1997)
K.Yokakawa、S.Satoh、C.Yamabe 等人:“利用 XeCl 准分子激光进行掩模型立体光刻的研究(日语)”日本激光学会专题会议报告。
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佐藤 三郎: "エキシマレーザを用いた光造形の研究" 産官学技術交流会 in北九州 予稿. 18 (1997)
佐藤三郎:“准分子激光立体光刻技术的研究”北九州产官学技术交流会初稿18(1997)。
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S.Satoh, C.Yamabe et al.: "Excimer Lamp Stereo-Lithpgraphy"Proceedings of SPIE - Laser Applications on Microelectronic and Optoelectronic Manufacturing V. Vol. 3933. 1-8 (2000)
S.Satoh、C.Yamabe 等人:“准分子灯立体光刻”SPIE 论文集 - 激光在微电子和光电制造中的应用 V. Vol。
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S.Satoh, C.Yamabe et al.: "Stereo-Lithography with XeCl Excimer Lamp"Proceedings of the 8th International Conference on Rapid Prototyping. (in press). (2000)
S.Satoh、C.Yamabe 等人:“使用 XeCl 准分子灯进行立体光刻”第八届国际快速原型会议论文集。
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