Elucidation of electron transport control by using the magnetic filter and enhancement of HィイD1-ィエD1DィイD1-ィエD1 production in high frequency negative ion source

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Production and control of both electron cyclotron resonance (ECR) plasmas and radio-frequency (RF) plasmas for negative ion sources have been studied. Findings are as follows :(1) HィイD1-ィエD1 volume production is confirmed in ECR plasmas although the effect of the magnetic filter (MF) for controlling plasma parameters is different from that in dc discharge plasmas.(2) In RF plasmas, Te is hardly reduced across the MF. The rf oscillating potentials are observed in the source region and may affect the role of MF for controlling plasma parameters.(3) Production and control of dc discharge plasmas for various gas species (i.e. Ar, NィイD22ィエD2, He and HィイD22ィエD2) is studied. Control of plasma parameters with the MF depends on the magnetic field intensity of the MF and gas species (i.e. ions).(4) By executing the one-dimensional electrostatic particle simulation, the ion beam instability is observed in the asymmetric plasmas divided by the MF.