Processes to Fabricate 3-Dimentional Micro Structure

3 维微观结构的制造工艺

• 批准号: 09044135
• 负责人: HARASHIMA Fumio
• 金额: $ 10.24万
• 依托单位: Tokyo metropolitan Institute of Technology (1998)The University of Tokyo (1997)
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for international Scientific Research
• 财政年份: 1997
• 资助国家: 日本
• 起止时间: 1997 至 1998
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-09044135/
• 关键词: Micro-Mechatronics; 3-dimensional micro structure; Nano Technology; Process; Manipulation; Tele-operation; Micro Actuator; Micro Sensor; 3次元マイクロ装置; MEMS; ナノ; マイクロ・モータ

We have visited each other according to the program of this year's project Our discussion, exchange information and cooperation were successful based on the results of last year's project. Especially Japanese and French members organized a international workshop on Nano technology and did extensive discussion how to organize Nano technology research with the viewpoint of micro mechanical technology. The discussion attracted a lot of attention from all over the world and we showed the new research direction of nano and micro technology by using this project.The results of this project were presented in many well-known international conference and workshop. There were so sincere and serious discussion with positive attitude to our international cooperative project. And we could lead the new research fields of nano technology. We hope that our leadership in nano and micro technology fields would last after completing this project.

我们根据今年的项目计划进行了互访。我们在去年项目成果的基础上进行了成功的讨论、交流信息和合作。特别是日本和法国的成员组织了一次关于纳米技术的国际研讨会，并就如何从微机械技术的角度组织纳米技术研究进行了广泛的讨论。该项目的研究成果在多个国际知名会议和研讨会上进行了展示，展示了纳米和微米技术的新研究方向。大家对我们的国际合作项目进行了真诚、认真、积极的讨论。我们可以引领纳米技术的新研究领域。我们希望在完成这个项目后，我们在纳米和微米技术领域的领导地位将持续下去。

项目成果

Yoshio Mita: "Two Dimensional Micro Conveyance System with Through Holes for Electrical and Fulidic Interconnection" Transducers 97. Volume 1. 37-40 (1997)

Yoshio Mita：“具有用于电气和流体互连的通孔的二维微输送系统”传感器 97. 第 1 卷 37-40 (1997)

H.Toshiyoshi: "Micromechanical Fiber Optic Switches based an Electromagnetic Torsion Mirros" 1998 IEEE/LEOS Summer Topical Meetings. 23-24 (1998)

H.Toshiyoshi：“基于电磁扭转镜的微机械光纤开关”1998 年 IEEE/LEOS 夏季主题会议。

E.H.Yang: "Fabrication and Characterization of U-shaped Beams for the Determination of Young's Modulus Modification due to Joule Heating of Polysilicon Microstructures" Transducers 97. Volume 1. 603-606 (1997)

E.H.Yang：“用于确定多晶硅微结构焦耳热引起的杨氏模量变化的 U 形梁的制造和表征”传感器 97。第 1 卷。603-606 (1997)

Satoshi Horiguchi: "Virtual Reality User Interface for Teleoperated Nanometer Scale Object" Proceedings of the 7th IEEE International Workshop on Robot and Human Communication. Volume 1. 142-147 (1998)

Satoshi Horiguchi：“遥控纳米级物体的虚拟现实用户界面”第七届 IEEE 国际机器人与人类通信研讨会论文集。

P,Langlet: "A quanlitative analysis of Scratch Dreive Actuation for integrared X/Y motion system" Transducers 97. Volume 2. 773-776 (1997)

P,Langlet：“集成 X/Y 运动系统的 Scratch Dreive Actuation 的定量分析”Transducers 97. Volume 2. 773-776 (1997)