High throughput multiprobe Rapid Probe Microscope system

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Infinitesima has developed a fundamentally different atomic force 3D surface measurement technique, the Rapid Probe Microscope. This combines revolutionary thermal-optical actuation with an interferometric measurement system delivering picometer precision and speeds \>100x faster than those achievable with conventional Atomic Force Microscope systems.This project aims to increase this throughput further by multiplexing the interferometry and actuation across many levers, bringing a further \>10x speed improvement. This will be of direct value to address the metrology challenges impacting the semiconductor fabrication processes of smaller and increasingly 3D features being developed and manufactured currently.