Developmene of micro/nanoscale plasma generator and its application to materialn process

我们开发了一种微/纳米级放电等离子体发生器，它由两个压电致动器控制的在介层/纳米尺度上具有超小间隙的两个电极和安装在高压室中的Langmuir等离子体探针系统组成。利用该装置，实现了10 μ m ~ 0.8 μ m范围内的测量级/纳米级氮气和空气等离子体。朗缪尔探测器的测量揭示了一个有趣的特征，即等离子体的非平衡冷性质，即使在高压环境中也是如此。此外，我们还利用该装置成功地进行了HOPG的中孔刻蚀。(2)等离子体环境下沟槽法和STM的发展。为了在非常小的区域（如微纳米等离子体）上研究等离子体，我们开发了等离子体环境中的沟槽法和扫描隧道显微镜（STM）。这些成果开辟了一个新的领域，即微/纳米等离子体科学与工程。

(1) Development of micro/manoscale plasma generatorWe have developed a microscale/nanoscale discharge plasma generator, which consists of two electrodes with an ultrasmall gap onthe mesosclae/nanoscale controlled by two piezoelectric actuators and Langmuir plasma probe system housed in a high pressurechamber. By means of this apparatus, the measoscale/nanoscale N2 and air plasmas in the range between 10 mu m and 0.8 mu m have been realized. Langmuir probe measurements revealed a n interesting characteristics, namely a non-equilibrium cold nature of the plasma, even in high-pressure environments. Moreover, we succeeded in mesocale etching of HOPG by this apparatus.(2) Development of trench method and STM in plasma environments.In order to investigate plasmas on very small regions, such as these micro/nanoscale plasma, we developed trench method and scanning tunneling microscope (STM) in plasma enviuronments.These achievements have opened up a new field, namely, microscale/nanoscale plasma science and engineering.