Developmene of micro/nanoscale plasma generator and its application to materialn process

微纳尺度等离子体发生器的研制及其在材料加工中的应用

• 批准号: 07555513
• 负责人: TERASHIMA Kazuo
• 金额: $ 2.43万
• 依托单位: The University of Tokyo
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Scientific Research (A)
• 财政年份: 1995
• 资助国家: 日本
• 起止时间: 1995 至 1996
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-07555513/
• 关键词: microplasma; nanoplasma; multiprobe; plasma STM; plasma etching; マイクロープラズマ; ナノスケーループラズマ; 微小ラングミュアー法

(1) Development of micro/manoscale plasma generatorWe have developed a microscale/nanoscale discharge plasma generator, which consists of two electrodes with an ultrasmall gap onthe mesosclae/nanoscale controlled by two piezoelectric actuators and Langmuir plasma probe system housed in a high pressurechamber. By means of this apparatus, the measoscale/nanoscale N2 and air plasmas in the range between 10 mu m and 0.8 mu m have been realized. Langmuir probe measurements revealed a n interesting characteristics, namely a non-equilibrium cold nature of the plasma, even in high-pressure environments. Moreover, we succeeded in mesocale etching of HOPG by this apparatus.(2) Development of trench method and STM in plasma environments.In order to investigate plasmas on very small regions, such as these micro/nanoscale plasma, we developed trench method and scanning tunneling microscope (STM) in plasma enviuronments.These achievements have opened up a new field, namely, microscale/nanoscale plasma science and engineering.

(1)微/纳米尺度等离子体发生器的研制我们研制了一种微/纳米尺度放电等离子体发生器，它由两个电极和朗缪尔等离子体探针系统组成，电极在介观/纳米尺度上具有超小的间隙，由两个压电致动器控制，朗缪尔等离子体探针系统安装在高压室中。利用该装置，实现了10 μ m ~ 0.8 μ m范围内的测量尺度/纳米尺度的N2和空气等离子体。朗缪尔探针测量揭示了一个有趣的特性，即等离子体的非平衡冷性质，即使在高压环境中。此外，我们成功地在介观蚀刻HOPG的装置。(2)等离子体环境下的沟槽法和扫描隧道显微镜（STM）的发展为了研究微/纳米等离子体等微小区域上的等离子体，我们发展了等离子体环境下的沟槽法和扫描隧道显微镜（STM），这些成果开辟了一个新的领域，即微/纳米等离子体科学与工程。

项目成果

K.Terashima et al: "Development of a nanoscale/mesoscale plasma generator" Thin Solid Films. 281-282. 634-636 (1996)

K.Terashima 等人：“纳米级/介观级等离子体发生器的开发”固体薄膜。

Kazuo Terashima ら: "Scanning tunneling microscopy of epitaxial YiBa_2Cu_3O_<7-x> films prepared by plasma flash evaporation" Journal of Applied Physics. 81・3. 1222-1226 (1997)

Kazuo Terashima 等人：“通过等离子体闪蒸蒸发制备的外延 YiBa_2Cu_3O_<7-x> 薄膜的扫描隧道显微镜”应用物理学杂志 81・3（1997）。

K. Terashima, L. Howald, H. Haefke, H. J. Gartherode: "DEVELOPMENT OF MESOSCALE/NANOSCALE PLASMA GENERATOR" Thin Solid Films. (発表予定). (1996)

K. Terashima、L. Howald、H. Haefke、H. J. Gartherode：“介观/纳米尺度等离子体发生器的开发”固体薄膜（即将公布）。

K.Terashima et al: "Scanning tunnoling microscopy of epitaxial YBCO prepared by plasma flash evaporation" J.Appl-Phys.81. 1222-1226 (1997)

K.Terashima 等人：“通过等离子体闪速蒸发制备外延 YBCO 的扫描隧道显微镜”J.Appl-Phys.81。

Kazuo Terashima ら: "Development of a nesoscale/nanoscale plasma generator" Thin Solid Films. 281-282. 634-636 (1996)

Kazuo Terashima 等人：“细尺度/纳米尺度等离子体发生器的开发”Thin Solid Films 281-282 (1996)。