Piecewise adaptive linearity compensation for multi-axis nanopositioning stages

昆斯盖特拥有独特的控制能力，在高速、高精度应用方面拥有专业知识。超低噪声电子设备允许在更高的带宽下工作；40%以上的舞台共振频率与低皮米分辨率。加速和减速控制可以实现最快的阶跃稳定时间，最近引入了速度控制，这对于快速成像具有显著的优势。作为Prior Science的一部分，昆斯盖特已经开发了更远距离的阶段，为使用多光子显微镜获取图像提供了显著的优势。分段自适应线性化补偿将改善更大范围(400微米到800微米)多轴工作台(XY和XYZ)和存在局部线性误差的工作台的线性化。改进的线性化将把远程多轴工作台的使用扩展到需要亚纳米分辨率的表面成像应用，并减少图像失真。这在生命科学、半导体晶圆测试和制造中都有应用，并具有量子光子学的潜力。

Queensgate have unique control capability with expertise in high speed, high precision applications. Ultra-low noise electronics allow operation at higher bandwidths; over 40% of the stage resonant frequency with low picometre resolutions. Control of acceleration and deceleration enables the fastest step settle times, and recently velocity control was introduced which has significant advantages for fast imaging.As part of Prior Scientific, Queensgate have developed longer-range stages providing significant advantages for image acquisition using multiphoton microscopy. Piecewise adaptive linearity compensation will improve linearization for longer range (400 µm to 800 µm) multi-axis stages (XY and XYZ) and stages with local linearity errors.Improved linearization will extend the use of the long-range multi-axis stage to surface imaging applications which require sub-nanometre resolutions and reduce image distortion. This has application in life science, semiconductor wafer testing and manufacture and has potential for quantum photonics.