Piecewise adaptive linearity compensation for multi-axis nanopositioning stages

多轴纳米定位平台的分段自适应线性补偿

• 批准号: 10022720
• 金额: $ 1.6万
• 依托单位: PRIOR SCIENTIFIC INSTRUMENTS LIMITED
• 依托单位国家: 英国
• 项目类别: Collaborative R&D
• 财政年份: 2022
• 资助国家: 英国
• 起止时间: 2022 至 无数据
• 项目状态: 已结题
• 来源: https://gtr.ukri.org/projects?ref=10022720
• 关键词: Piecewise; adaptive; linearity; compensation; multi

Queensgate have unique control capability with expertise in high speed, high precision applications. Ultra-low noise electronics allow operation at higher bandwidths; over 40% of the stage resonant frequency with low picometre resolutions. Control of acceleration and deceleration enables the fastest step settle times, and recently velocity control was introduced which has significant advantages for fast imaging.As part of Prior Scientific, Queensgate have developed longer-range stages providing significant advantages for image acquisition using multiphoton microscopy. Piecewise adaptive linearity compensation will improve linearization for longer range (400 µm to 800 µm) multi-axis stages (XY and XYZ) and stages with local linearity errors.Improved linearization will extend the use of the long-range multi-axis stage to surface imaging applications which require sub-nanometre resolutions and reduce image distortion. This has application in life science, semiconductor wafer testing and manufacture and has potential for quantum photonics.

Queensgate具有独特的控制能力，具有高速，高精度应用的专业知识。超低噪声电子器件允许在更高带宽下运行；低皮米分辨率的级谐振频率超过40%。加速和减速控制可以实现最快的步长稳定时间，最近引入的速度控制对快速成像具有显着的优势。作为先验科学的一部分，皇后门已经开发出远程阶段，为使用多光子显微镜进行图像采集提供了显着优势。分段自适应线性补偿将改善较长距离（400µm至800µm）多轴级（XY和XYZ）和具有局部线性误差的级的线性化。改进的线性化将把远程多轴级的使用扩展到需要亚纳米分辨率和减少图像失真的表面成像应用。这在生命科学、半导体晶圆测试和制造中有应用，在量子光子学中也有潜力。