Piecewise adaptive linearity compensation for multi-axis nanopositioning stages

点击翻译按钮获取中文摘要

Queensgate have unique control capability with expertise in high speed, high precision applications. Ultra-low noise electronics allow operation at higher bandwidths; over 40% of the stage resonant frequency with low picometre resolutions. Control of acceleration and deceleration enables the fastest step settle times, and recently velocity control was introduced which has significant advantages for fast imaging.As part of Prior Scientific, Queensgate have developed longer-range stages providing significant advantages for image acquisition using multiphoton microscopy. Piecewise adaptive linearity compensation will improve linearization for longer range (400 µm to 800 µm) multi-axis stages (XY and XYZ) and stages with local linearity errors.Improved linearization will extend the use of the long-range multi-axis stage to surface imaging applications which require sub-nanometre resolutions and reduce image distortion. This has application in life science, semiconductor wafer testing and manufacture and has potential for quantum photonics.